Possibilities of humidity sensing with thermal transient testing on porous structures

András Vass-Várnai, Péter Fürjes, Márta Rencz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Both the modern environmental monitoring and the home automation applications require new tailor made humidity sensor solutions. A significant group of humidity sensors is based on the property changes of porous thick and thin films [1]. Capacitive sensors make use of the dielectric property changes of such films upon water vapor uptake which depends on the surrounding media's relative humidity content [2]. However as the water molecules enter the porous layer beside the dielectric constant the thermal conductivity of the layer changes as well. Thermal transient testing, a well known technique for thermal characterization of IC packages [3] can be a suitable method for detecting humidity changes this way. In the paper this measuring technique is evaluated. Experiments were done on an appropriate sensor structure at different environments and relative humidity levels. Based on the results, a new method for humidity sensing is introduced.

Original languageEnglish
Title of host publication14th International Workshop on Thermal Investigation of ICs and Systems, THERMINIC 2008
Pages200-203
Number of pages4
DOIs
Publication statusPublished - Dec 22 2008
Event14th International Workshop on THERMal INvestigation of ICs and Systems, THERMINIC 2008 - Rome, Italy
Duration: Sep 24 2008Sep 26 2008

Publication series

Name14th International Workshop on THERMal INvestigation of ICs and Systems, THERMINIC 2008

Other

Other14th International Workshop on THERMal INvestigation of ICs and Systems, THERMINIC 2008
CountryItaly
CityRome
Period9/24/089/26/08

ASJC Scopus subject areas

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Vass-Várnai, A., Fürjes, P., & Rencz, M. (2008). Possibilities of humidity sensing with thermal transient testing on porous structures. In 14th International Workshop on Thermal Investigation of ICs and Systems, THERMINIC 2008 (pp. 200-203). [4669908] (14th International Workshop on THERMal INvestigation of ICs and Systems, THERMINIC 2008). https://doi.org/10.1109/THERMINIC.2008.4669908