Porous TiO2 thin films prepared by spray pyrolysis deposition (SPD) technique and their application to UV sensors

Masayuki Okuya, Katsuyuki Shiozaki, Nobuyuki Horikawa, Tsuyoshi Kosugi, G. R Asoka Kumara, J. Madarász, Shoji Kaneko, G. Pokol

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

Porous TiO2 thin films were prepared from titanium(IV)oxy acetylacetonate solutions by spray pyrolysis deposition (SPD) technique in air. The surface morphology and grain size of the film was easily controlled by changing species of solvent in the source solution. The TiO2 film was employed as a light absorbing i-layer for UV sensor to deposit CuO/TiO 2/SnO2 p-i-n junction by SPD technique. We found that the surface morphology of TiO2 layer was very much affective on UV response, attributing to the light confinement within TiO2 layer. Additionally, the response was further improved by reducing a carrier density in the TiO2 layer.

Original languageEnglish
Pages (from-to)527-531
Number of pages5
JournalSolid State Ionics
Volume172
Issue number1-4 SPEC. ISS.
DOIs
Publication statusPublished - Aug 31 2004

Fingerprint

Spray pyrolysis
Surface morphology
pyrolysis
sprayers
Thin films
sensors
Sensors
thin films
Titanium
Carrier concentration
Deposits
p-i-n junctions
Air
titanium
grain size
deposits
air
acetyl acetonate

Keywords

  • Spray pyrolysis deposition
  • Surface morphology
  • Thin film
  • Titanium dioxide
  • UV sensor

ASJC Scopus subject areas

  • Electrochemistry
  • Physical and Theoretical Chemistry
  • Energy Engineering and Power Technology
  • Materials Chemistry
  • Condensed Matter Physics

Cite this

Porous TiO2 thin films prepared by spray pyrolysis deposition (SPD) technique and their application to UV sensors. / Okuya, Masayuki; Shiozaki, Katsuyuki; Horikawa, Nobuyuki; Kosugi, Tsuyoshi; Kumara, G. R Asoka; Madarász, J.; Kaneko, Shoji; Pokol, G.

In: Solid State Ionics, Vol. 172, No. 1-4 SPEC. ISS., 31.08.2004, p. 527-531.

Research output: Contribution to journalArticle

Okuya, Masayuki ; Shiozaki, Katsuyuki ; Horikawa, Nobuyuki ; Kosugi, Tsuyoshi ; Kumara, G. R Asoka ; Madarász, J. ; Kaneko, Shoji ; Pokol, G. / Porous TiO2 thin films prepared by spray pyrolysis deposition (SPD) technique and their application to UV sensors. In: Solid State Ionics. 2004 ; Vol. 172, No. 1-4 SPEC. ISS. pp. 527-531.
@article{f5be455eb42242bcab46e4192aa012fd,
title = "Porous TiO2 thin films prepared by spray pyrolysis deposition (SPD) technique and their application to UV sensors",
abstract = "Porous TiO2 thin films were prepared from titanium(IV)oxy acetylacetonate solutions by spray pyrolysis deposition (SPD) technique in air. The surface morphology and grain size of the film was easily controlled by changing species of solvent in the source solution. The TiO2 film was employed as a light absorbing i-layer for UV sensor to deposit CuO/TiO 2/SnO2 p-i-n junction by SPD technique. We found that the surface morphology of TiO2 layer was very much affective on UV response, attributing to the light confinement within TiO2 layer. Additionally, the response was further improved by reducing a carrier density in the TiO2 layer.",
keywords = "Spray pyrolysis deposition, Surface morphology, Thin film, Titanium dioxide, UV sensor",
author = "Masayuki Okuya and Katsuyuki Shiozaki and Nobuyuki Horikawa and Tsuyoshi Kosugi and Kumara, {G. R Asoka} and J. Madar{\'a}sz and Shoji Kaneko and G. Pokol",
year = "2004",
month = "8",
day = "31",
doi = "10.1016/j.ssi.2004.02.060",
language = "English",
volume = "172",
pages = "527--531",
journal = "Solid State Ionics",
issn = "0167-2738",
publisher = "Elsevier",
number = "1-4 SPEC. ISS.",

}

TY - JOUR

T1 - Porous TiO2 thin films prepared by spray pyrolysis deposition (SPD) technique and their application to UV sensors

AU - Okuya, Masayuki

AU - Shiozaki, Katsuyuki

AU - Horikawa, Nobuyuki

AU - Kosugi, Tsuyoshi

AU - Kumara, G. R Asoka

AU - Madarász, J.

AU - Kaneko, Shoji

AU - Pokol, G.

PY - 2004/8/31

Y1 - 2004/8/31

N2 - Porous TiO2 thin films were prepared from titanium(IV)oxy acetylacetonate solutions by spray pyrolysis deposition (SPD) technique in air. The surface morphology and grain size of the film was easily controlled by changing species of solvent in the source solution. The TiO2 film was employed as a light absorbing i-layer for UV sensor to deposit CuO/TiO 2/SnO2 p-i-n junction by SPD technique. We found that the surface morphology of TiO2 layer was very much affective on UV response, attributing to the light confinement within TiO2 layer. Additionally, the response was further improved by reducing a carrier density in the TiO2 layer.

AB - Porous TiO2 thin films were prepared from titanium(IV)oxy acetylacetonate solutions by spray pyrolysis deposition (SPD) technique in air. The surface morphology and grain size of the film was easily controlled by changing species of solvent in the source solution. The TiO2 film was employed as a light absorbing i-layer for UV sensor to deposit CuO/TiO 2/SnO2 p-i-n junction by SPD technique. We found that the surface morphology of TiO2 layer was very much affective on UV response, attributing to the light confinement within TiO2 layer. Additionally, the response was further improved by reducing a carrier density in the TiO2 layer.

KW - Spray pyrolysis deposition

KW - Surface morphology

KW - Thin film

KW - Titanium dioxide

KW - UV sensor

UR - http://www.scopus.com/inward/record.url?scp=7544238716&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=7544238716&partnerID=8YFLogxK

U2 - 10.1016/j.ssi.2004.02.060

DO - 10.1016/j.ssi.2004.02.060

M3 - Article

AN - SCOPUS:7544238716

VL - 172

SP - 527

EP - 531

JO - Solid State Ionics

JF - Solid State Ionics

SN - 0167-2738

IS - 1-4 SPEC. ISS.

ER -