Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

P. Fürjes, A. Kovács, C. Dücső, M. Ádám, B. Müller, U. Mescheder

Research output: Contribution to journalArticle

68 Citations (Scopus)

Abstract

A novel design of a one wafer side processed porous silicon-based humidity sensor with interdigital electrodes is presented. An integrated heater element over the porous layer provides the effective heating and the low power consumption of the device. Reliable contacts between metal and porous Si are formed via crystalline n-Si islands within the porous layer, formed by exploiting the selectivity of the electrochemical etching process. The effects of the electrode and heater geometry and also the parameters of the porous matrix are investigated with special emphasis on response and recovery time. To ensure the adequate thermal conditions sensor structures and packaging techniques were also investigated. The applied heater geometry results in faster recovery at a cost of reduced power consumption.

Original languageEnglish
Pages (from-to)140-144
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume95
Issue number1-3
DOIs
Publication statusPublished - Oct 15 2003

Fingerprint

Humidity sensors
Porous silicon
porous silicon
heaters
humidity
Electric power utilization
Electrochemical etching
Recovery
Electrodes
electrodes
Geometry
sensors
recovery
Packaging
Metals
geometry
Crystalline materials
Heating
packaging
Sensors

Keywords

  • Effective heating
  • Humidity sensor
  • Porous silicon

ASJC Scopus subject areas

  • Analytical Chemistry
  • Electrochemistry
  • Electrical and Electronic Engineering

Cite this

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters. / Fürjes, P.; Kovács, A.; Dücső, C.; Ádám, M.; Müller, B.; Mescheder, U.

In: Sensors and Actuators, B: Chemical, Vol. 95, No. 1-3, 15.10.2003, p. 140-144.

Research output: Contribution to journalArticle

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AU - Mescheder, U.

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