Porous silicon as multifunctional material in MEMS

U. M. Mescheder, A. Kovacs, W. Kronast, I. Bársony, M. Ádám, C. Dücső

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Porous Si with pore size in the range of a few nanometer can be used as multifunctional material in different MEMS applications. In this paper we first discuss the fabrication and characterization of porous Si. Porous Si has been used as sacrificial layer for the realization of micro-heaters, micro-hotplates and microphones. A new type of surface micromachining process for the fabrication of sub-um freestanding crystalline structures is presented. The use of porous Si as functional layer for different types of microsystems is discussed.

Original languageEnglish
Title of host publicationProceedings of the IEEE Conference on Nanotechnology
PublisherIEEE Computer Society
Pages483-488
Number of pages6
Volume2001-January
ISBN (Print)0780372158
DOIs
Publication statusPublished - 2001
Event1st IEEE Conference on Nanotechnology, IEEE-NANO 2001 - Maui, United States
Duration: Oct 28 2001Oct 30 2001

Other

Other1st IEEE Conference on Nanotechnology, IEEE-NANO 2001
CountryUnited States
CityMaui
Period10/28/0110/30/01

Fingerprint

Porous silicon
porous silicon
microelectromechanical systems
MEMS
Surface micromachining
Fabrication
fabrication
Microsystems
micromachining
Microphones
microphones
heaters
Pore size
Crystalline materials
porosity

Keywords

  • MEMS
  • Micromachining
  • Microsystems
  • Porous silicon

ASJC Scopus subject areas

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics

Cite this

Mescheder, U. M., Kovacs, A., Kronast, W., Bársony, I., Ádám, M., & Dücső, C. (2001). Porous silicon as multifunctional material in MEMS. In Proceedings of the IEEE Conference on Nanotechnology (Vol. 2001-January, pp. 483-488). [966471] IEEE Computer Society. https://doi.org/10.1109/NANO.2001.966470

Porous silicon as multifunctional material in MEMS. / Mescheder, U. M.; Kovacs, A.; Kronast, W.; Bársony, I.; Ádám, M.; Dücső, C.

Proceedings of the IEEE Conference on Nanotechnology. Vol. 2001-January IEEE Computer Society, 2001. p. 483-488 966471.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mescheder, UM, Kovacs, A, Kronast, W, Bársony, I, Ádám, M & Dücső, C 2001, Porous silicon as multifunctional material in MEMS. in Proceedings of the IEEE Conference on Nanotechnology. vol. 2001-January, 966471, IEEE Computer Society, pp. 483-488, 1st IEEE Conference on Nanotechnology, IEEE-NANO 2001, Maui, United States, 10/28/01. https://doi.org/10.1109/NANO.2001.966470
Mescheder UM, Kovacs A, Kronast W, Bársony I, Ádám M, Dücső C. Porous silicon as multifunctional material in MEMS. In Proceedings of the IEEE Conference on Nanotechnology. Vol. 2001-January. IEEE Computer Society. 2001. p. 483-488. 966471 https://doi.org/10.1109/NANO.2001.966470
Mescheder, U. M. ; Kovacs, A. ; Kronast, W. ; Bársony, I. ; Ádám, M. ; Dücső, C. / Porous silicon as multifunctional material in MEMS. Proceedings of the IEEE Conference on Nanotechnology. Vol. 2001-January IEEE Computer Society, 2001. pp. 483-488
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