Porosity and thickness characterization of porous Si and oxidized porous Si layers - An ultraviolet-visible-mid infrared ellipsometry study

Balint Fodor, Emil Agocs, Benjamin Bardet, Thomas Defforge, Frederic Cayrel, Daniel Alquier, Miklos Fried, Gael Gautier, Peter Petrik

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

This paper suggests the evaluation of morphological parameters of porous silicon layers (PSL) using spectroscopic ellipsometry from UV to mid-infrared optical range. PSL were prepared by electrochemical etching of monocrystalline silicon wafers in hydrofluoric acid-based electrolyte. Measuring with an optical and an infrared ellipsometer with a wide spectral range permits an accurate characterization of PSL properties from the top surface to the bottom of the layer with thicknesses from several hundred nanometers up to a few tens of micrometers. Several different optical models for ellipsometric evaluations were developed to determine the thickness, the average porosity, the in-depth porosity gradient, the oxidation level and the surface roughness of the PSL. Porosity was modeled with multiple effective medium layers by varying ratio of crystalline silicon, void and oxidized silicon wherever needed. Thin PSL (<5 μm) show no impact of current density on porosity and thickness. However, evaluation of thick PSL (20-50 μm) highlights the in-depth porosity gradient. Thickness values were also cross-checked with electron microscopy confirming the proposed ellipsometric models. Additionally, different oxidation techniques have also been compared in terms of oxidation level and void content. Volume expansion during PSL oxidation follows exactly the same behavior as that during the oxidation of planar silicon wafers.

Original languageEnglish
Pages (from-to)112-120
Number of pages9
JournalMicroporous and Mesoporous Materials
Volume227
DOIs
Publication statusPublished - Jun 2016

Keywords

  • Electrochemical etching
  • Infrared ellipsometry
  • Measurement of porosity
  • Oxidation
  • Porous silicon layer

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials

Fingerprint Dive into the research topics of 'Porosity and thickness characterization of porous Si and oxidized porous Si layers - An ultraviolet-visible-mid infrared ellipsometry study'. Together they form a unique fingerprint.

  • Cite this