Pop-in effect in Ge- and Si-coated single-crystalline Si

P. Nagy, Kálmán Vad, A. Csík, E. Kálmán

Research output: Contribution to journalArticle

Abstract

In nanoindentation tests the pop-in effect is a sudden increase in penetration depth without an increase in load, caused by some special effect because of the smaller specific volume of the high-pressure phase in Si. It has been investigated in Si samples covered with 20, 50, 100 and 150 nm thick layers of amorphous Si or Ge in single and multiple load events. The impressions caused by the indentation were imaged by atomic force microscopy. The characteristics of the load curves and the shape of the indented impressions are correlated. Our experiments provide a consistent evaluation of the Young's modulus and hardness of the samples and consistent data on the exact shape of the indent impressions. The dependence of the variation of the magnitude and spatial distribution of the relaxed volume on the composition and thickness of the sputtered layer is discussed.

Original languageEnglish
Pages (from-to)858-861
Number of pages4
JournalInternational Journal of Materials Research
Volume99
Issue number8
DOIs
Publication statusPublished - Aug 2008

Fingerprint

Special effects
Nanoindentation
Indentation
Density (specific gravity)
Spatial distribution
Atomic force microscopy
Elastic moduli
Hardness
Crystalline materials
Chemical analysis
Experiments
nanoindentation
indentation
modulus of elasticity
spatial distribution
hardness
penetration
atomic force microscopy
evaluation
curves

Keywords

  • Atomic force microscopy
  • Fracture
  • Nanoindentation
  • Pop-in
  • Silicon

ASJC Scopus subject areas

  • Metals and Alloys
  • Materials Chemistry
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this

Pop-in effect in Ge- and Si-coated single-crystalline Si. / Nagy, P.; Vad, Kálmán; Csík, A.; Kálmán, E.

In: International Journal of Materials Research, Vol. 99, No. 8, 08.2008, p. 858-861.

Research output: Contribution to journalArticle

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