Polytype pure sp2-BN thin films as dictated by the substrate crystal structure

Mikhail Chubarov, Henrik Pedersen, Hans Högberg, Z. Czigány, Magnus Garbrecht, Anne Henry

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Boron nitride (BN) is a promising semiconductor material, but its current exploration is hampered by difficulties in growth of single crystalline phase-pure thin films. We compare the growth of sp2-BN by chemical vapor deposition on (0001) 6H-SiC and on (0001) α-Al2O3 substrates with an AlN buffer layer. Polytype-pure rhombohedral BN (r-BN) with a thickness of 200 nm is observed on SiC whereas hexagonal BN (h-BN) nucleates and grows on the AlN buffer layer. For the latter case after a thickness of 4 nm, the h-BN growth is followed by r-BN growth to a total thickness of 200 nm. We find that the polytype of the sp2-BN films is determined by the ordering of Si-C or Al-N atomic pairs in the underlying crystalline structure (SiC or AlN). In the latter case the change from h-BN to r-BN is triggered by stress relaxation. This is important for the development of BN semiconductor device technology.

Original languageEnglish
Pages (from-to)1640-1645
Number of pages6
JournalChemistry of Materials
Volume27
Issue number5
DOIs
Publication statusPublished - Mar 10 2015

Fingerprint

Boron nitride
Crystal structure
Thin films
Substrates
Buffer layers
Crystalline materials
Stress relaxation
Semiconductor devices
boron nitride
Chemical vapor deposition
Semiconductor materials

ASJC Scopus subject areas

  • Materials Chemistry
  • Chemical Engineering(all)
  • Chemistry(all)

Cite this

Chubarov, M., Pedersen, H., Högberg, H., Czigány, Z., Garbrecht, M., & Henry, A. (2015). Polytype pure sp2-BN thin films as dictated by the substrate crystal structure. Chemistry of Materials, 27(5), 1640-1645. https://doi.org/10.1021/cm5043815

Polytype pure sp2-BN thin films as dictated by the substrate crystal structure. / Chubarov, Mikhail; Pedersen, Henrik; Högberg, Hans; Czigány, Z.; Garbrecht, Magnus; Henry, Anne.

In: Chemistry of Materials, Vol. 27, No. 5, 10.03.2015, p. 1640-1645.

Research output: Contribution to journalArticle

Chubarov, M, Pedersen, H, Högberg, H, Czigány, Z, Garbrecht, M & Henry, A 2015, 'Polytype pure sp2-BN thin films as dictated by the substrate crystal structure', Chemistry of Materials, vol. 27, no. 5, pp. 1640-1645. https://doi.org/10.1021/cm5043815
Chubarov, Mikhail ; Pedersen, Henrik ; Högberg, Hans ; Czigány, Z. ; Garbrecht, Magnus ; Henry, Anne. / Polytype pure sp2-BN thin films as dictated by the substrate crystal structure. In: Chemistry of Materials. 2015 ; Vol. 27, No. 5. pp. 1640-1645.
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