Plasmathermal synthesis of ceramic powders

J. Szepvolgyi, I. Toth, T. Szekely, G. Szentgyorgyi

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Synthesis of ultrafine silicon nitride and titanium dioxide powders was investigated in an inductively coupled laboratory scale plasma reactor operating with high purity argon as plasma gas and argon, nitrogen or oxygen as sheath gases. Appropriate chlorides, ammonia and oxygen have been used as reagents. The R.F. generator operated at 27.17 MHz with an output power of 2 to 6 kW. Products were characterised by making use of AAS, ICP, TG, DTA, SEM, BET, XPS and XRD techniques. Effects of the operating parameters, particularly the output power and feed rates of the reagents on the properties and yields of products have been studied in detail.

Original languageEnglish
Pages (from-to)578-586
Number of pages9
JournalInternational Journal of Materials and Product Technology
Issue number3-6
Publication statusPublished - Dec 1 1995


ASJC Scopus subject areas

  • Safety, Risk, Reliability and Quality
  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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