Periodic surface deformations caused by high dose ion bombardment induced lateral stresses

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Wave-like patterns are frequently observed on certain high dose ion bombarded materials after flaking, excessive sputtering and in some cases directly on the otherwise unchanged surface. At present, no satisfactory explanation is available for the formation of these interesting features. The aim of this paper is to show that the ripple patterns appearing in the three cases are of the same origin, namely they are caused by elastic instability of the implanted layer. The available experimental data are in good agreement with theoretical predictions.

Original languageEnglish
Pages (from-to)607-610
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume19-20
Issue numberPART 2
DOIs
Publication statusPublished - 1987

Fingerprint

Ion bombardment
Dosimetry
Sputtering
bombardment
flaking
Ions
dosage
ripples
ions
sputtering
predictions

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

@article{2b95d941f9184da0b234d936a06444ac,
title = "Periodic surface deformations caused by high dose ion bombardment induced lateral stresses",
abstract = "Wave-like patterns are frequently observed on certain high dose ion bombarded materials after flaking, excessive sputtering and in some cases directly on the otherwise unchanged surface. At present, no satisfactory explanation is available for the formation of these interesting features. The aim of this paper is to show that the ripple patterns appearing in the three cases are of the same origin, namely they are caused by elastic instability of the implanted layer. The available experimental data are in good agreement with theoretical predictions.",
author = "C. Hajd{\'u} and F. P{\'a}szti and M. Fried and I. Lovas",
year = "1987",
doi = "10.1016/S0168-583X(87)80122-2",
language = "English",
volume = "19-20",
pages = "607--610",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "PART 2",

}

TY - JOUR

T1 - Periodic surface deformations caused by high dose ion bombardment induced lateral stresses

AU - Hajdú, C.

AU - Pászti, F.

AU - Fried, M.

AU - Lovas, I.

PY - 1987

Y1 - 1987

N2 - Wave-like patterns are frequently observed on certain high dose ion bombarded materials after flaking, excessive sputtering and in some cases directly on the otherwise unchanged surface. At present, no satisfactory explanation is available for the formation of these interesting features. The aim of this paper is to show that the ripple patterns appearing in the three cases are of the same origin, namely they are caused by elastic instability of the implanted layer. The available experimental data are in good agreement with theoretical predictions.

AB - Wave-like patterns are frequently observed on certain high dose ion bombarded materials after flaking, excessive sputtering and in some cases directly on the otherwise unchanged surface. At present, no satisfactory explanation is available for the formation of these interesting features. The aim of this paper is to show that the ripple patterns appearing in the three cases are of the same origin, namely they are caused by elastic instability of the implanted layer. The available experimental data are in good agreement with theoretical predictions.

UR - http://www.scopus.com/inward/record.url?scp=0022999493&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0022999493&partnerID=8YFLogxK

U2 - 10.1016/S0168-583X(87)80122-2

DO - 10.1016/S0168-583X(87)80122-2

M3 - Article

AN - SCOPUS:0022999493

VL - 19-20

SP - 607

EP - 610

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - PART 2

ER -