Periodic surface deformations caused by high dose ion bombardment induced lateral stresses

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Abstract

Wave-like patterns are frequently observed on certain high dose ion bombarded materials after flaking, excessive sputtering and in some cases directly on the otherwise unchanged surface. At present, no satisfactory explanation is available for the formation of these interesting features. The aim of this paper is to show that the ripple patterns appearing in the three cases are of the same origin, namely they are caused by elastic instability of the implanted layer. The available experimental data are in good agreement with theoretical predictions.

Original languageEnglish
Pages (from-to)607-610
Number of pages4
JournalNuclear Inst. and Methods in Physics Research, B
Volume19-20
Issue numberPART 2
DOIs
Publication statusPublished - 1987

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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