Patterning ZnO layers with frequency doubled and quadrupled Nd:YAG laser for PV application

András Buzás, Zsolt Geretovszky

Research output: Contribution to journalArticle

14 Citations (Scopus)


We report the feasibility of nanosecond laser patterning of ZnO layer in CIGS-based solar cells. Patterning the ZnO layer on top of the entire solar cell structure (i.e. substrate configuration), as well as scribing the transparent conducting oxide layer on glass substrate (i.e. superstrate configuration) was studied at frequency doubled and quadrupled Nd:YAG wavelengths. We found that the 100 nm ZnO/glass structure can easily be patterned by both wavelengths, while for the 1 μm thick layer better results were achieved with UV pulses. In the substrate configuration patterning with the visible laser permits controllable cutting, while even mild UV processing causes severe damage to the underlying CIGS layer.

Original languageEnglish
Pages (from-to)8495-8499
Number of pages5
JournalThin Solid Films
Issue number24 SPEC. ISS.
Publication statusPublished - Oct 15 2007


  • Cu(In,Ga)Se
  • Laser processing
  • Solar cell
  • Thin film
  • ZnO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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