Patterning photosensitive layers for optoelectronic applications

Istvan Csarnovics, Sandor Molnar, Julia Burunkova, Dmitrii Zhuk, Igor Denisyuk, Attila Bonyar, Csaba Cserhati, Sandor Kokenyesi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The technology of light-sensitive amorphous chalcogenide layers, made from As-Ge-Se raw glasses, thick layers of acrylic polymers, made from mixture of isomers as well as two types of nanocomposites of these materials with gold nanoparticles was developed. These layers were used for direct, one-step surface geometrical and optical (amplitude-phase) relief recording by laser- or electron-beams. Investigations were directed to the establishment of giant geometrical relief formation processes, which resulted elements like bumps, single lines and diffractive gratings applicable as elements of integrated optics. The mechanism of the recording processes, which include excitation of electron-hole processes, structural transformation or polymerization, as well as mass-transport component was accepted for explanation of comparable effects at light- and electron beam recording. Selection of the materials and recording conditions with best resulting parameters was done.

Original languageEnglish
Title of host publicationISSE 2015 - 38th International Spring Seminar on Electronics Technology, Proceedings
EditorsHeinz Wohlrabe, Oliver Krammer, Johann Nicolics, Manuela Franz
PublisherIEEE Computer Society
Pages57-60
Number of pages4
ISBN (Electronic)9781479988600
DOIs
Publication statusPublished - Sep 9 2015
Event38th International Spring Seminar on Electronics Technology, ISSE 2015 - Eger, Hungary
Duration: May 6 2015May 10 2015

Publication series

NameProceedings of the International Spring Seminar on Electronics Technology
Volume2015-September
ISSN (Print)2161-2528
ISSN (Electronic)2161-2536

Other

Other38th International Spring Seminar on Electronics Technology, ISSE 2015
CountryHungary
CityEger
Period5/6/155/10/15

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality

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  • Cite this

    Csarnovics, I., Molnar, S., Burunkova, J., Zhuk, D., Denisyuk, I., Bonyar, A., Cserhati, C., & Kokenyesi, S. (2015). Patterning photosensitive layers for optoelectronic applications. In H. Wohlrabe, O. Krammer, J. Nicolics, & M. Franz (Eds.), ISSE 2015 - 38th International Spring Seminar on Electronics Technology, Proceedings (pp. 57-60). [7247962] (Proceedings of the International Spring Seminar on Electronics Technology; Vol. 2015-September). IEEE Computer Society. https://doi.org/10.1109/ISSE.2015.7247962