Patterning of porous alumina for integrated humidity sensors

László Juhász, László Oláh, János Mizsei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we would like to introduce our experimental results on the patterning of the thin film porous alumina sensing layer. We used three different approaches for the patterning of the alumina we would like to use in integrated humidity sensors in the future. The first was the wet etching of the completed alumina covering the entire wafer surface with conventional photolithography. The second method was based on selective anodization using photoresist as barrier layer to prevent the formation of alumina from aluminum where it is not necessary. In the third case we used a chemically resistant and conductive layer below the pre-patterned Al "islands" for proper electrical connection needed during anodization. The results of the different methods were compared and optimal parameters were given where it was possible.

Original languageEnglish
Title of host publication2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009
Pages219-222
Number of pages4
Publication statusPublished - Sep 23 2009
Event2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009 - Rome, Italy
Duration: Apr 1 2009Apr 3 2009

Publication series

NameDTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Other

Other2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009
CountryItaly
CityRome
Period4/1/094/3/09

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Juhász, L., Oláh, L., & Mizsei, J. (2009). Patterning of porous alumina for integrated humidity sensors. In 2009 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, MEMS/MOEMS 2009 (pp. 219-222). [4919517] (DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS).