Particle simulation methods for studies of low-pressure plasma sources

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Abstract

This paper illustrates the application of particle simulation methods for the description of low-pressure discharges: Townsend discharges, cathode fall dominated dc glows and capacitively coupled radiofrequency discharges. The spatially and/or temporally varying electric field and the presence of boundaries (e.g. electrodes) in these plasma sources induce a non-hydrodynamic (or non-equilibrium) transport of some types of charged species, particularly of electrons. Particle-based methods provide, even under non-equilibrium conditions, a correct method of mathematical description of the particle transport and the determination of the distribution functions, which are crucial quantities in discharge modeling.

Original languageEnglish
Article number024001
JournalPlasma Sources Science and Technology
Volume20
Issue number2
DOIs
Publication statusPublished - Apr 2011

Fingerprint

low pressure
Townsend discharge
nonequilibrium conditions
simulation
cathodes
distribution functions
electrodes
electric fields
electrons

ASJC Scopus subject areas

  • Condensed Matter Physics

Cite this

Particle simulation methods for studies of low-pressure plasma sources. / Donkó, Z.

In: Plasma Sources Science and Technology, Vol. 20, No. 2, 024001, 04.2011.

Research output: Contribution to journalArticle

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