Paradoxical features of small angle multiple scattering in matter and their implications in depth profiling with IBA

G. Amsel, G. Battistig, A. L'Hoir

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Energy loss and small angle multiple scattering (MS) of fast ions both arise from the cumulative effect of successive independent binary encounters, the corresponding energy transfers or deflections being additive random variables. These processes are hence governed by statistical laws of the same type. Nevertheless their evolution with thickness of matter crossed is radically different, MS presenting a number of seemingly paradoxical features. These peculiar aspects are emphasized and illustrated. The strong statistical dependence between angular spread and lateral displacement of the projectiles is also stressed. These special features play a basic role in ion beam handling and in the interpretation of IBA depth profiling measurements.

Original languageEnglish
Pages (from-to)1037-1042
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume219-220
Issue number1-4
DOIs
Publication statusPublished - Jun 2004

Fingerprint

Depth profiling
Multiple scattering
random variables
Projectiles
scattering
Random variables
encounters
Energy transfer
Ion beams
projectiles
deflection
Energy dissipation
energy dissipation
energy transfer
ion beams
Ions
ions

Keywords

  • Angular distribution
  • Ion beam analysis
  • Lateral spread
  • Multiple scattering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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AB - Energy loss and small angle multiple scattering (MS) of fast ions both arise from the cumulative effect of successive independent binary encounters, the corresponding energy transfers or deflections being additive random variables. These processes are hence governed by statistical laws of the same type. Nevertheless their evolution with thickness of matter crossed is radically different, MS presenting a number of seemingly paradoxical features. These peculiar aspects are emphasized and illustrated. The strong statistical dependence between angular spread and lateral displacement of the projectiles is also stressed. These special features play a basic role in ion beam handling and in the interpretation of IBA depth profiling measurements.

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