Pairing of noble metals with phosphorus

H. Zimmermann, N. Q. Khanh, G. Battistig, J. Gyulai, H. Ryssel

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Abstract

Pairing of gold and platinum with phosphorus is examined. For this purpose, gold, respectively platinum, is diffused into silicon wafers, which contained phosphorus doped regions. A value of 1.0×1019 cm-3 at 900°C is suggested for the equilibrium concentration of gold phosphorus pairs for a phosphorus concentration of 3.0×1020 cm -3. The pair-forming capability of platinum with phosphorus is found to be much smaller. The equilibrium concentration of platinum phosphorus pairs is less than 3×1017 cm-3. Deep level transient spectroscopy measurements show that gold does not penetrate a 14 μm thick phosphorus layer in 2 h and that the platinum concentration in the bulk is a factor of four smaller than in reference samples without phosphorus doping.

Original languageEnglish
Pages (from-to)748-750
Number of pages3
JournalApplied Physics Letters
Volume60
Issue number6
DOIs
Publication statusPublished - Dec 1 1992

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ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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