Pairing of gold and platinum with phosphorus is examined. For this purpose, gold, respectively platinum, is diffused into silicon wafers, which contained phosphorus doped regions. A value of 1.0×1019 cm-3 at 900°C is suggested for the equilibrium concentration of gold phosphorus pairs for a phosphorus concentration of 3.0×1020 cm -3. The pair-forming capability of platinum with phosphorus is found to be much smaller. The equilibrium concentration of platinum phosphorus pairs is less than 3×1017 cm-3. Deep level transient spectroscopy measurements show that gold does not penetrate a 14 μm thick phosphorus layer in 2 h and that the platinum concentration in the bulk is a factor of four smaller than in reference samples without phosphorus doping.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)