Oscillations and power-dependent hysteresis in reactive ZnO plasma

Á Németh, Z. Lábadi, L. Tóth, I. Bársony

Research output: Contribution to journalArticle

Abstract

Al doped zinc oxide (AZO) layers were deposited onto soda lime glass substrate by reactive magnetron sputtering. Properties of the reactive plasma were monitored. Our results show two characteristic behaviors (hysteresis and oscillation). A qualitative physical explanation for spontaneous and stable plasma oscillations is provided. Necessary conditions for the formation of the oscillation phenomena are studied as a function of oxygen mass flow and power.

Original languageEnglish
Pages (from-to)218-220
Number of pages3
JournalVacuum
Volume84
Issue number1
DOIs
Publication statusPublished - Aug 25 2009

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Keywords

  • Oscillation
  • Reactive sputtering
  • ZnO

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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