Optimum parameters for combined Auger-ionization loss coincidence spectroscopy in the reflection mode

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The detection limit of AES can be improved by combined Auger-electron loss coincidence spectroscopy (AES-ILSCS) as proposed by Cazaux. Using an arrangement with two hemispherical analysers and large-angle collectors, experimental parameters are optimized by (1) matching the energy windows ΔEs of the spectrometers to achieve a large peak/background ratio, (2) setting the angular positions to obtain identical sampling depths for AES and ILS and (3) tilting the sample and using an adjustable electron gun at glancing incidence to get a large ILS signal. False coincidence can be reduced by small ΔEs and using very fast detectors in the coincidence mode for post-accelerated AES and ILS electrons. Based on Langeron's data, the estimated coincidence signal/false coincidence noise ratio is 1 for 10-4 Fe coverage on an Si substrate using 9 keV, 10 nA primary electrons and a Δt ≈ï1 ns coincidence interval. The detection limit can be improved by a factor of 102 with respect to conventional AES.

Original languageEnglish
Pages (from-to)1-4
Number of pages4
JournalSurface and Interface Analysis
Volume19
Issue number1-12
DOIs
Publication statusPublished - Jun 1 1992

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instrument landing systems
Ionization
Spectroscopy
ionization
Electrons
spectroscopy
Electron guns
electrons
electron guns
accumulators
Spectrometers
incidence
sampling
spectrometers
Sampling
Detectors
intervals
detectors
Substrates
energy

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Materials Chemistry
  • Surfaces, Coatings and Films

Cite this

Optimum parameters for combined Auger-ionization loss coincidence spectroscopy in the reflection mode. / Gergely, G.

In: Surface and Interface Analysis, Vol. 19, No. 1-12, 01.06.1992, p. 1-4.

Research output: Contribution to journalArticle

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