Optimization of the output beam homogeneity of short-pulse KrF amplifiers

Matthias Feuerhake, Peter Simon, Gábor Almási, Tamás Nagy, Sándor Szatmári

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

The output beam of short-pulse excimer amplifiers exhibits an inhomogeneous spatial intensity distribution caused by diffraction effects at laser windows and mirrors. Theoretical and experimental studies show that the amplification parameters of a KrF amplifier can be optimized with respect to the output beam homogeneity by proper choice of the energy density in the amplifier. The homogenized intensity distribution is obtained at the plane of the output window of the amplifier and can be transferred by optical imaging onto a target plane. It is shown that the amplification parameters for the best output homogeneity are close to the ones previously found for optimal energy extraction efficiency.

Original languageEnglish
Pages (from-to)4094-4098
Number of pages5
JournalApplied Optics
Volume36
Issue number18
DOIs
Publication statusPublished - Jun 20 1997

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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