Optimization of the depth resolution in ERDA of H using 12C ions

E. Szilágyi, F. Pászti, V. Quillet, F. Abel

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17 Citations (Scopus)

Abstract

Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilágyi and F. Pászti, these Proceedings (IBA-11, Balatonfüred, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilágyi, F. Pászti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a 12C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.

Original languageEnglish
Pages (from-to)63-67
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume85
Issue number1-4
DOIs
Publication statusPublished - Mar 2 1994

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Ions
optimization
Depth profiling
Metal foil
ions
Geometry
Hungary
congressional reports
foils
absorbers
inhomogeneity
geometry
approximation
titanium nickelide

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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title = "Optimization of the depth resolution in ERDA of H using 12C ions",
abstract = "Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szil{\'a}gyi and F. P{\'a}szti, these Proceedings (IBA-11, Balatonf{\"u}red, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szil{\'a}gyi, F. P{\'a}szti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a 12C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.",
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T1 - Optimization of the depth resolution in ERDA of H using 12C ions

AU - Szilágyi, E.

AU - Pászti, F.

AU - Quillet, V.

AU - Abel, F.

PY - 1994/3/2

Y1 - 1994/3/2

N2 - Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilágyi and F. Pászti, these Proceedings (IBA-11, Balatonfüred, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilágyi, F. Pászti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a 12C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.

AB - Depth resolution is one important parameter in the depth profiling of H by elastic recoil detection analysis (ERDA). We report on depth resolution measurements and compare them with those calculated by the DEPTH code [E. Szilágyi and F. Pászti, these Proceedings (IBA-11, Balatonfüred, Hungary, 1993) Nucl. Instr. and Meth. B 85 (1994) 616; E. Szilágyi, F. Pászti and G. Amsel, Nucl. Instr. and Meth. B, to be submitted]. Experimental conditions were determined as precisely as possible: the straggling in the absorber foil and the effect of its inhomogeneity were directly measured and an analytical approximation of the results was incorporated into the DEPTH code. ERDA depth resolutions were measured and calculated on a multilayered Ni-Ti:H sandwich target, with a 12C beam of 2.55 MeV in different geometrical conditions. Measurements and calculations agree fairly well. Optimization of depth resolution versus geometry has also been undertaken yielding a near-surface resolution of approximately 2 nm.

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