Optimization of the depth resolution in elastic recoil detection

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Elastic recoil detection (ERD) by 1H(4He,4He)1H reaction is a fast, nondestructive method for depth profiling of hydrogen isotopes. The paper presents an experimental and theoretical study of the depth resolution under different conditions. A depth resolution of 10 nm can be achieved.

Original languageEnglish
Pages (from-to)507-512
Number of pages6
JournalNuclear Inst. and Methods in Physics Research, B
Issue number4
Publication statusPublished - Apr 1 1991


ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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