Optimization of technology for the systems of hard-oxide layers by spectroscopic methods

K. Fluck, G. Szalai, J. Kojnok, A. Szasz

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2 Citations (Scopus)


The well-known evaporating process of hard-oxid coatings for laser mirrors has many uncontrolled parameters. This paper deals with the Ti0, -SiO2 hard-oxides systems. The optimization of technology is based on optical [transmission; reflection parameters etc), spectroscopical [soft x-ray emission spectroscopy /SXES/, x-ray fluorescence spectroscopy /XFS/], structural (x-ray diffraction /XRD/) and damage threshold /DT examinations. The Ti02 was found in the evaporated layers in two equilibrium phases - rutil and anatase - depending on the evapora-tion conditions. The rutil phase was better than the anatase considering the DT for mirrors at λ=]1064 µm. The explanation is based on the difference of the near-infrared absorbtion between rutil and anatase phase of Ti02

Original languageEnglish
Pages (from-to)307-315
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Oct 13 1986


ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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