Optimization of particle fluence in micromachining of CR-39

I. Rajta, E. Baradács, A. A. Bettiol, I. Csige, K. Tőkési, L. Budai, A. Kiss

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

Polyallyl diglycol carbonate (CR-39 etched track detector) material was irradiated with various doses of 2 MeV protons and alpha-particles in order to optimize the fluence for P-beam writing of CR-39. Irradiation were performed at the Institute of Nuclear Research, Debrecen, Hungary and at the National University of Singapore. Post irradiation work has been carried out in Debrecen. The fluence in the irradiated area was sufficiently high that the latent tracks overlapped and the region could be removed collectively by short etching times of the order of less than 1 min. Theoretical calculations based on analytical and Monte Carlo simulations were done in order to calculate the probability of multiple latent track overlap. Optimal particle fluence was found by minimising the fluence and etching time at which collective removal of latent tracks could be observed. Short etching time is required to obtain high resolution microstructures, while low particle fluence is desirable for economical reasons, and also because high fluences increase the risk of unwanted damage (e.g. melting).

Original languageEnglish
Pages (from-to)384-388
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume231
Issue number1-4
DOIs
Publication statusPublished - Apr 2005

Fingerprint

Micromachining
micromachining
Etching
fluence
optimization
Irradiation
Alpha particles
Carbonates
etching
Protons
Melting
Detectors
Hungary
Singapore
nuclear research
Microstructure
irradiation
alpha particles
CR 39
carbonates

Keywords

  • CR-39
  • Fluence sensitivity
  • P-beam writing
  • Polyallyl diglycol carbonate (PADC)
  • Proton beam micromachining

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Optimization of particle fluence in micromachining of CR-39. / Rajta, I.; Baradács, E.; Bettiol, A. A.; Csige, I.; Tőkési, K.; Budai, L.; Kiss, A.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 231, No. 1-4, 04.2005, p. 384-388.

Research output: Contribution to journalArticle

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AU - Budai, L.

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