Optimization of microfluidic flow sensors for different flow ranges by FEM simulation

Ferenc Ender, Hunor Sántha, V. Székely

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Finite element simulation and post-processing results of calorimetric type microfluidic mass flow sensors are presented. The output characteristics of a calorimetric flow sensor are functions of the geometrical position of the temperature sensor elements. A given flow sensor (with a given technology on a given substrate) can be optimized for different flow ranges by determining the position of the temperature sensor elements. The simplified mathematical model of the steady-state thermal profile along the microfluidic channel is presented. It is also shown how the output characteristics depend on the position of the temperature sensors and the ratio of the convective and conductive heat transfer. The optimal parameters of a silicon substrate based microfluidic flow sensor for low and for high flow ranges were calculated by FEM simulation. Based on the simulation results the silicon substrate based microfluidic flow sensor could be optimized for different flow ranges.

Original languageEnglish
Title of host publicationISSE 2010 - 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration - Conference Proceedings
Pages308-313
Number of pages6
DOIs
Publication statusPublished - 2010
Event33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration, ISSE 2010 - Warsaw, Poland
Duration: May 12 2010May 16 2010

Other

Other33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration, ISSE 2010
CountryPoland
CityWarsaw
Period5/12/105/16/10

Fingerprint

Microfluidics
Finite element method
Temperature sensors
Sensors
Substrates
Silicon
Mathematical models
Heat transfer
Processing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Ender, F., Sántha, H., & Székely, V. (2010). Optimization of microfluidic flow sensors for different flow ranges by FEM simulation. In ISSE 2010 - 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration - Conference Proceedings (pp. 308-313). [5547309] https://doi.org/10.1109/ISSE.2010.5547309

Optimization of microfluidic flow sensors for different flow ranges by FEM simulation. / Ender, Ferenc; Sántha, Hunor; Székely, V.

ISSE 2010 - 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration - Conference Proceedings. 2010. p. 308-313 5547309.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ender, F, Sántha, H & Székely, V 2010, Optimization of microfluidic flow sensors for different flow ranges by FEM simulation. in ISSE 2010 - 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration - Conference Proceedings., 5547309, pp. 308-313, 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration, ISSE 2010, Warsaw, Poland, 5/12/10. https://doi.org/10.1109/ISSE.2010.5547309
Ender F, Sántha H, Székely V. Optimization of microfluidic flow sensors for different flow ranges by FEM simulation. In ISSE 2010 - 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration - Conference Proceedings. 2010. p. 308-313. 5547309 https://doi.org/10.1109/ISSE.2010.5547309
Ender, Ferenc ; Sántha, Hunor ; Székely, V. / Optimization of microfluidic flow sensors for different flow ranges by FEM simulation. ISSE 2010 - 33rd International Spring Seminar on Electronics Technology: Polymer Electronics and Nanotechnologies: Towards System Integration - Conference Proceedings. 2010. pp. 308-313
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