Optical properties of porous silicon. Part II

Fabrication and investigation of multilayer structures

Krisztián Kordás, Szabolcs Beke, A. Pap, Antti Uusimäki, Seppo Leppävuori

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

By knowing the wavelength dependent optical parameters (refractive index n and absorption coefficient α) and the obtained thickness of porous silicon (PS) layers when anodizing boron-doped Si wafers, one can design and realize periodic structures by alternating the current density during anodization. Such periodicity in the structure - and thus in optical properties within a film - results in a superlattice, which acts as a Bragg grating. By considering the proper Bragg conditions, the fabrication of optical filter/reflector components can be performed in a simple manner. In this paper, both theoretical and experimental aspects of the fabrication procedure are investigated.

Original languageEnglish
Pages (from-to)257-260
Number of pages4
JournalOptical Materials
Volume25
Issue number3
DOIs
Publication statusPublished - Apr 2004

Fingerprint

Porous silicon
porous silicon
laminates
Multilayers
Optical properties
optical properties
Fabrication
anodizing
fabrication
Bragg gratings
Boron
Optical filters
Periodic structures
Anodic oxidation
optical filters
reflectors
periodic variations
Refractive index
absorptivity
boron

Keywords

  • Bragg mirror
  • Photonics
  • Porous silicon
  • Refractive index
  • Sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Optical properties of porous silicon. Part II : Fabrication and investigation of multilayer structures. / Kordás, Krisztián; Beke, Szabolcs; Pap, A.; Uusimäki, Antti; Leppävuori, Seppo.

In: Optical Materials, Vol. 25, No. 3, 04.2004, p. 257-260.

Research output: Contribution to journalArticle

Kordás, Krisztián ; Beke, Szabolcs ; Pap, A. ; Uusimäki, Antti ; Leppävuori, Seppo. / Optical properties of porous silicon. Part II : Fabrication and investigation of multilayer structures. In: Optical Materials. 2004 ; Vol. 25, No. 3. pp. 257-260.
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