Optical properties of ceramic-like layers obtained by low energy ion beam irradiation of polysiloxane films

Giovanni Marietta, A. Tóth, I. Bertóti, Tran Minh Duc, Francoise Sommer, K. Ferencz

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18 Citations (Scopus)

Abstract

In the present paper we report on the modifications induced by low energy particle beams (1-5 keV He+, Ar+, N+2, He0, N02 and H02) on the chemical structure, optical properties and surface morphology of silicon-based polymer, polyhydroxy-methyl-siloxane (PHMSO). The in situ XPS analysis shows that ion irradiation induces depletion of C atoms and progressive enrichment of Si and O atoms within the irradiated layers, yielding a ceramic-like SiOxCyHz phase of variable composition. For a given projectile, a steady state composition is reached in any case above the fluence of 1 × 1016 particles/cm2. The most efficient conversion to a ceramic-like layer, with a final composition SiO1.85-1.89C0.3-0.4 Hz, is obtained by using 5 keV He+ beams, while N+2 and Ar+ seem less effective. At variance of this, a dramatic carbon enrichment is observed when the PHMSO films are irradiated with fast neutral particles (FAB treatments). The optical measurements show that in general the beam-converted layers remain practically absorption-less, while the relevant features of the reflectivity spectra (positions of maxima and minima) critically depend upon the type of projectile. Thus, 5 keV He+ ion irradiation induces the shift of the reflectivity maxima to shorter wavelengths (blue shift), while 5 keV N+2 ions induce no shift and irradiation with N2 or H2 neutral beams induce a red shift. The AFM measurements show that also the surface morphology critically depends on the nature of the irradiating particles. Thus, 5 keV He+ irradiation produces films as flat as the original polymer surface, while irradiation with Ar+ (inducing a lower degree of conversion) increases the roughness, N+2 irradiation induces characteristic undulations of the surfaces and FAB treatments induces a much higher surface roughening. The experiments show clearly that both the compositional modifications and the irradiation-induced nanometer scale morphological features critically determine the optical properties of the irradiated materials.

Original languageEnglish
Pages (from-to)684-692
Number of pages9
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume141
Issue number1-4
Publication statusPublished - May 1998

Fingerprint

Siloxanes
polysiloxanes
Silicones
Ion beams
Optical properties
ion beams
Irradiation
ceramics
optical properties
irradiation
FORTRAN
siloxanes
Projectiles
Ion bombardment
ion irradiation
Surface morphology
projectiles
Polymers
Chemical analysis
energy

Keywords

  • Ion beams
  • Optical properties
  • Polymers
  • Surface treatments

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

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title = "Optical properties of ceramic-like layers obtained by low energy ion beam irradiation of polysiloxane films",
abstract = "In the present paper we report on the modifications induced by low energy particle beams (1-5 keV He+, Ar+, N+2, He0, N02 and H02) on the chemical structure, optical properties and surface morphology of silicon-based polymer, polyhydroxy-methyl-siloxane (PHMSO). The in situ XPS analysis shows that ion irradiation induces depletion of C atoms and progressive enrichment of Si and O atoms within the irradiated layers, yielding a ceramic-like SiOxCyHz phase of variable composition. For a given projectile, a steady state composition is reached in any case above the fluence of 1 × 1016 particles/cm2. The most efficient conversion to a ceramic-like layer, with a final composition SiO1.85-1.89C0.3-0.4 Hz, is obtained by using 5 keV He+ beams, while N+2 and Ar+ seem less effective. At variance of this, a dramatic carbon enrichment is observed when the PHMSO films are irradiated with fast neutral particles (FAB treatments). The optical measurements show that in general the beam-converted layers remain practically absorption-less, while the relevant features of the reflectivity spectra (positions of maxima and minima) critically depend upon the type of projectile. Thus, 5 keV He+ ion irradiation induces the shift of the reflectivity maxima to shorter wavelengths (blue shift), while 5 keV N+2 ions induce no shift and irradiation with N2 or H2 neutral beams induce a red shift. The AFM measurements show that also the surface morphology critically depends on the nature of the irradiating particles. Thus, 5 keV He+ irradiation produces films as flat as the original polymer surface, while irradiation with Ar+ (inducing a lower degree of conversion) increases the roughness, N+2 irradiation induces characteristic undulations of the surfaces and FAB treatments induces a much higher surface roughening. The experiments show clearly that both the compositional modifications and the irradiation-induced nanometer scale morphological features critically determine the optical properties of the irradiated materials.",
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author = "Giovanni Marietta and A. T{\'o}th and I. Bert{\'o}ti and Duc, {Tran Minh} and Francoise Sommer and K. Ferencz",
year = "1998",
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TY - JOUR

T1 - Optical properties of ceramic-like layers obtained by low energy ion beam irradiation of polysiloxane films

AU - Marietta, Giovanni

AU - Tóth, A.

AU - Bertóti, I.

AU - Duc, Tran Minh

AU - Sommer, Francoise

AU - Ferencz, K.

PY - 1998/5

Y1 - 1998/5

N2 - In the present paper we report on the modifications induced by low energy particle beams (1-5 keV He+, Ar+, N+2, He0, N02 and H02) on the chemical structure, optical properties and surface morphology of silicon-based polymer, polyhydroxy-methyl-siloxane (PHMSO). The in situ XPS analysis shows that ion irradiation induces depletion of C atoms and progressive enrichment of Si and O atoms within the irradiated layers, yielding a ceramic-like SiOxCyHz phase of variable composition. For a given projectile, a steady state composition is reached in any case above the fluence of 1 × 1016 particles/cm2. The most efficient conversion to a ceramic-like layer, with a final composition SiO1.85-1.89C0.3-0.4 Hz, is obtained by using 5 keV He+ beams, while N+2 and Ar+ seem less effective. At variance of this, a dramatic carbon enrichment is observed when the PHMSO films are irradiated with fast neutral particles (FAB treatments). The optical measurements show that in general the beam-converted layers remain practically absorption-less, while the relevant features of the reflectivity spectra (positions of maxima and minima) critically depend upon the type of projectile. Thus, 5 keV He+ ion irradiation induces the shift of the reflectivity maxima to shorter wavelengths (blue shift), while 5 keV N+2 ions induce no shift and irradiation with N2 or H2 neutral beams induce a red shift. The AFM measurements show that also the surface morphology critically depends on the nature of the irradiating particles. Thus, 5 keV He+ irradiation produces films as flat as the original polymer surface, while irradiation with Ar+ (inducing a lower degree of conversion) increases the roughness, N+2 irradiation induces characteristic undulations of the surfaces and FAB treatments induces a much higher surface roughening. The experiments show clearly that both the compositional modifications and the irradiation-induced nanometer scale morphological features critically determine the optical properties of the irradiated materials.

AB - In the present paper we report on the modifications induced by low energy particle beams (1-5 keV He+, Ar+, N+2, He0, N02 and H02) on the chemical structure, optical properties and surface morphology of silicon-based polymer, polyhydroxy-methyl-siloxane (PHMSO). The in situ XPS analysis shows that ion irradiation induces depletion of C atoms and progressive enrichment of Si and O atoms within the irradiated layers, yielding a ceramic-like SiOxCyHz phase of variable composition. For a given projectile, a steady state composition is reached in any case above the fluence of 1 × 1016 particles/cm2. The most efficient conversion to a ceramic-like layer, with a final composition SiO1.85-1.89C0.3-0.4 Hz, is obtained by using 5 keV He+ beams, while N+2 and Ar+ seem less effective. At variance of this, a dramatic carbon enrichment is observed when the PHMSO films are irradiated with fast neutral particles (FAB treatments). The optical measurements show that in general the beam-converted layers remain practically absorption-less, while the relevant features of the reflectivity spectra (positions of maxima and minima) critically depend upon the type of projectile. Thus, 5 keV He+ ion irradiation induces the shift of the reflectivity maxima to shorter wavelengths (blue shift), while 5 keV N+2 ions induce no shift and irradiation with N2 or H2 neutral beams induce a red shift. The AFM measurements show that also the surface morphology critically depends on the nature of the irradiating particles. Thus, 5 keV He+ irradiation produces films as flat as the original polymer surface, while irradiation with Ar+ (inducing a lower degree of conversion) increases the roughness, N+2 irradiation induces characteristic undulations of the surfaces and FAB treatments induces a much higher surface roughening. The experiments show clearly that both the compositional modifications and the irradiation-induced nanometer scale morphological features critically determine the optical properties of the irradiated materials.

KW - Ion beams

KW - Optical properties

KW - Polymers

KW - Surface treatments

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