Optical characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films

C. Schmidt, P. Petrik, C. Schneider, M. Fried, T. Lohner, I. Bársony, J. Gyulai, H. Ryssel

Research output: Contribution to journalConference article

6 Citations (Scopus)

Abstract

Strontium-bismuth-tantalate (SBT) is a new kind of dielectric layer material for use in semiconductor devices. The optical layer parameters of SBT were characterized by spectroscopic ellipsometry using the well-known Cauchy model as well as the Adachi model (Phys. Rev. B 35 (1987) 7454-7463). A comparison of both models was performed. Furthermore, these optical data were compared with the physical and chemical behavior examined by Rutherford backscattering (RBS) and X-ray diffraction (XRD). As a result, it was possible to fit the measured spectra with both optical models. But with the Adachi model, it was possible to evaluate the optical layer parameters in a wider range than in the measured spectral range covering the region of the band gap. The Adachi model provides electronic layer parameters like the transition energy E 0. Our investigations also include the determination of the stoichiometry dependence of the optical layer parameters.

Original languageEnglish
Pages (from-to)495-499
Number of pages5
JournalThin Solid Films
Volume455-456
DOIs
Publication statusPublished - May 1 2004
EventThe 3rd International Conference on Spectroscopic Ellipsometry - Vienna, Austria
Duration: Jul 6 2003Jul 11 2003

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Keywords

  • Metal-organic chemical vapor deposition (MOCVD)
  • Spectroscopic ellipsometry (SE)
  • Strontium-bismuth-tantalate (SBT)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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