Optical analysis of room temperature magnetron sputtered ITO films by reflectometry and spectroscopic ellipsometry

Tivadar Lohner, K. Jagadeesh Kumar, Péter Petrik, Aryasomayajula Subrahmanyam, István Bársony

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Indium-tin-oxide (ITO) thin films were prepared by reactive magnetron sputtering; their optical constants and thickness were determined by spectral reflectometry (SR) in the wavelength range from 400 nm to 800 nm and spectroscopic ellipsometry (SE) in the wavelength range from 191 nm to 1690 nm. A comparative evaluation of the measured data from SR and SE has been made using the same single layer optical model based on the Cauchy dispersion relation. The introduction of a surface roughness layer into the optical model considerably improved the fit quality during evaluation of SE data. Vertical inhomogeneity of the ITO thin films was assessed using a multilayer optical model describing porosity gradient and the three-layer optical model suggested by Jung [Y.S. Jung, Thin Solid Films 467, 36 (2004)] from the SE data.

Original languageEnglish
Pages (from-to)1528-1536
Number of pages9
JournalJournal of Materials Research
Volume29
Issue number14
DOIs
Publication statusPublished - Jul 28 2014

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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