On the electrochemical applications of the bending beam method

G. Láng, Masahiro Seo

Research output: Contribution to journalArticle

44 Citations (Scopus)

Abstract

Measuring the bending of a plate to determine the stress in thin films coated on one side of a substrate is a common technique. The surface stress changes can be estimated by using an appropriate form of Stoney's equation, if the thickness of the film is sufficiently less than that of the substrate. The changes in the bending of the substrate are usually calculated from the displacement of the reflected laser beam measured, e.g., with a position sensitive photo detector (PSD). Since the displacement of the light spot on the PSD is measured in air outside the liquid phase (where the mirroring surface is located), the measured values should be corrected according to Snell's law of refraction. A relation between the reciprocal of curvature radius of the substrate and the displacement of the laser beam on PSD was derived by taking into account the bending of the laser beam due to refraction at the optical window. It is shown that the neglect of the refraction at the optical window may cause an error of 25-30% in the estimation of the stress changes.

Original languageEnglish
Pages (from-to)98-101
Number of pages4
JournalJournal of Electroanalytical Chemistry
Volume490
Issue number1
DOIs
Publication statusPublished - Aug 18 2000

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Refraction
Laser beams
Substrates
Detectors
Thin films
Liquids
Air

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Analytical Chemistry
  • Electrochemistry

Cite this

On the electrochemical applications of the bending beam method. / Láng, G.; Seo, Masahiro.

In: Journal of Electroanalytical Chemistry, Vol. 490, No. 1, 18.08.2000, p. 98-101.

Research output: Contribution to journalArticle

@article{be5fae1e2aaf4bd2ab089ca50e583d75,
title = "On the electrochemical applications of the bending beam method",
abstract = "Measuring the bending of a plate to determine the stress in thin films coated on one side of a substrate is a common technique. The surface stress changes can be estimated by using an appropriate form of Stoney's equation, if the thickness of the film is sufficiently less than that of the substrate. The changes in the bending of the substrate are usually calculated from the displacement of the reflected laser beam measured, e.g., with a position sensitive photo detector (PSD). Since the displacement of the light spot on the PSD is measured in air outside the liquid phase (where the mirroring surface is located), the measured values should be corrected according to Snell's law of refraction. A relation between the reciprocal of curvature radius of the substrate and the displacement of the laser beam on PSD was derived by taking into account the bending of the laser beam due to refraction at the optical window. It is shown that the neglect of the refraction at the optical window may cause an error of 25-30{\%} in the estimation of the stress changes.",
author = "G. L{\'a}ng and Masahiro Seo",
year = "2000",
month = "8",
day = "18",
doi = "10.1016/S0022-0728(00)00220-5",
language = "English",
volume = "490",
pages = "98--101",
journal = "Journal of Electroanalytical Chemistry",
issn = "0022-0728",
publisher = "Elsevier Sequoia",
number = "1",

}

TY - JOUR

T1 - On the electrochemical applications of the bending beam method

AU - Láng, G.

AU - Seo, Masahiro

PY - 2000/8/18

Y1 - 2000/8/18

N2 - Measuring the bending of a plate to determine the stress in thin films coated on one side of a substrate is a common technique. The surface stress changes can be estimated by using an appropriate form of Stoney's equation, if the thickness of the film is sufficiently less than that of the substrate. The changes in the bending of the substrate are usually calculated from the displacement of the reflected laser beam measured, e.g., with a position sensitive photo detector (PSD). Since the displacement of the light spot on the PSD is measured in air outside the liquid phase (where the mirroring surface is located), the measured values should be corrected according to Snell's law of refraction. A relation between the reciprocal of curvature radius of the substrate and the displacement of the laser beam on PSD was derived by taking into account the bending of the laser beam due to refraction at the optical window. It is shown that the neglect of the refraction at the optical window may cause an error of 25-30% in the estimation of the stress changes.

AB - Measuring the bending of a plate to determine the stress in thin films coated on one side of a substrate is a common technique. The surface stress changes can be estimated by using an appropriate form of Stoney's equation, if the thickness of the film is sufficiently less than that of the substrate. The changes in the bending of the substrate are usually calculated from the displacement of the reflected laser beam measured, e.g., with a position sensitive photo detector (PSD). Since the displacement of the light spot on the PSD is measured in air outside the liquid phase (where the mirroring surface is located), the measured values should be corrected according to Snell's law of refraction. A relation between the reciprocal of curvature radius of the substrate and the displacement of the laser beam on PSD was derived by taking into account the bending of the laser beam due to refraction at the optical window. It is shown that the neglect of the refraction at the optical window may cause an error of 25-30% in the estimation of the stress changes.

UR - http://www.scopus.com/inward/record.url?scp=0142109435&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0142109435&partnerID=8YFLogxK

U2 - 10.1016/S0022-0728(00)00220-5

DO - 10.1016/S0022-0728(00)00220-5

M3 - Article

VL - 490

SP - 98

EP - 101

JO - Journal of Electroanalytical Chemistry

JF - Journal of Electroanalytical Chemistry

SN - 0022-0728

IS - 1

ER -