Observation of local SIMOX layers by microprobe RBS

A. Kinomura, Y. Horino, Y. Mokuno, A. Chayahara, M. Kiuchi, K. Fujii, M. Takai, T. Lohner, H. Ryssel, R. Schork

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Buried oxide layers locally formed by oxygen implantation in silicon were analyzed by Rutherford backscattering with a 1.5 MeV He+ microprobe. Lateral and cross-sectional images of O and Si atoms in the buried oxide layers could be successfully obtained by scanning the microprobe over the sample. The Si images showed better contrasts than the O images. A process-failure region was detected by RBS mapping images.

Original languageEnglish
Pages (from-to)921-924
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume85
Issue number1-4
DOIs
Publication statusPublished - Mar 2 1994

Fingerprint

Oxides
Rutherford backscattering spectroscopy
Silicon
Oxygen
Scanning
Atoms
oxides
implantation
backscattering
scanning
silicon
oxygen
atoms

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Observation of local SIMOX layers by microprobe RBS. / Kinomura, A.; Horino, Y.; Mokuno, Y.; Chayahara, A.; Kiuchi, M.; Fujii, K.; Takai, M.; Lohner, T.; Ryssel, H.; Schork, R.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 85, No. 1-4, 02.03.1994, p. 921-924.

Research output: Contribution to journalArticle

Kinomura, A, Horino, Y, Mokuno, Y, Chayahara, A, Kiuchi, M, Fujii, K, Takai, M, Lohner, T, Ryssel, H & Schork, R 1994, 'Observation of local SIMOX layers by microprobe RBS', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 85, no. 1-4, pp. 921-924. https://doi.org/10.1016/0168-583X(94)95951-X
Kinomura, A. ; Horino, Y. ; Mokuno, Y. ; Chayahara, A. ; Kiuchi, M. ; Fujii, K. ; Takai, M. ; Lohner, T. ; Ryssel, H. ; Schork, R. / Observation of local SIMOX layers by microprobe RBS. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 1994 ; Vol. 85, No. 1-4. pp. 921-924.
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