Novel method for electroless etching of 6H–SiC

Gyula Károlyházy, Dávid Beke, Dóra Zalka, Sándor Lenk, Olga Krafcsik, Katalin Kamarás, Ádám Gali

Research output: Contribution to journalArticle

1 Citation (Scopus)


In this article, we report an electroless method to fabricate porous hexagonal silicon carbide and hexagonal silicon carbide nanoparticles (NPs) as small as 1 nm using wet chemical stain etching. We observe quantum confinement effect for ultrasmall hexagonal SiC NPs in contrast to the cubic SiC NPs. We attribute this difference to the various surface terminations of the two polytypes of SiC NPs.

Original languageEnglish
Article number538
Issue number3
Publication statusPublished - Mar 2020


  • Chemical etching
  • Nanoparticles
  • Photoluminescence spectroscopy
  • Silicon carbide
  • X-ray photoemission spectroscopy

ASJC Scopus subject areas

  • Chemical Engineering(all)
  • Materials Science(all)

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  • Cite this

    Károlyházy, G., Beke, D., Zalka, D., Lenk, S., Krafcsik, O., Kamarás, K., & Gali, Á. (2020). Novel method for electroless etching of 6H–SiC. Nanomaterials, 10(3), [538].