Note: Fabrication of resolution target for super-resolution microscopy

Y. Iketaki, H. Oi, N. Bokor, H. Kumagai

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Abstract

We fabricated a resolution target for super-resolution microscopes (SRMs). The target was constructed by scattering a dyed photo-resist on a glass cover plate and used UV nano-imprinting to transfer minute line-and-space patterns on to the photo-resist layer. Using this resolution target, an image obtained from a SRM and its properties was evaluated quantitatively.

Original languageEnglish
Article number086109
JournalReview of Scientific Instruments
Volume86
Issue number8
DOIs
Publication statusPublished - Aug 1 2015

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ASJC Scopus subject areas

  • Instrumentation

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