Nondestructive determination of damage depth profiles in ion-implanted semiconductors by multiple-angle-of-incidence single-wavelength ellipsometry using different optical models

M. Fried, T. Lohner, E. Jároli, N. Q. Khanh, C. Hajdu, J. Gyulai

Research output: Contribution to journalArticle

10 Citations (Scopus)

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Physics & Astronomy