Noise investigation of ultraviolet laser induced grain structure in polyimide films

Z. Kocsis, Zs Kincses, B. Hopp, G. Ripka, I. Mojzes

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The ultraviolet laser treatment of polyimide films can lead to the formation of conductive area. The conductive layers show a carbon-rich grain structure. The heat treatment was carried out in air and nitrogen atmosphere. Morphology of conductive layers was investigated by scanning electron microscopy and transmission electron microscopy. On laser induced conductive layer, electrical noise investigation was carried out Our investigation shows that laser induced layers have 1/f noise spectra. According to our results, conductive layers prepared in nitrogen atmosphere have better stability than those prepared in air.

Original languageEnglish
Pages (from-to)549-551
Number of pages3
JournalJournal of Electronic Materials
Volume25
Issue number3
Publication statusPublished - Mar 1996

Fingerprint

Ultraviolet lasers
Crystal microstructure
ultraviolet lasers
polyimides
Polyimides
Nitrogen
Lasers
Air
Carbon
Heat treatment
Transmission electron microscopy
Scanning electron microscopy
nitrogen
atmospheres
air
noise spectra
lasers
heat treatment
transmission electron microscopy
scanning electron microscopy

Keywords

  • 1/f noise
  • Excimer laser
  • Laser induced conductivity
  • Polyimide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Materials Science(all)
  • Electronic, Optical and Magnetic Materials
  • Physics and Astronomy (miscellaneous)

Cite this

Noise investigation of ultraviolet laser induced grain structure in polyimide films. / Kocsis, Z.; Kincses, Zs; Hopp, B.; Ripka, G.; Mojzes, I.

In: Journal of Electronic Materials, Vol. 25, No. 3, 03.1996, p. 549-551.

Research output: Contribution to journalArticle

Kocsis, Z, Kincses, Z, Hopp, B, Ripka, G & Mojzes, I 1996, 'Noise investigation of ultraviolet laser induced grain structure in polyimide films', Journal of Electronic Materials, vol. 25, no. 3, pp. 549-551.
Kocsis, Z. ; Kincses, Zs ; Hopp, B. ; Ripka, G. ; Mojzes, I. / Noise investigation of ultraviolet laser induced grain structure in polyimide films. In: Journal of Electronic Materials. 1996 ; Vol. 25, No. 3. pp. 549-551.
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