New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell

Eniko Bándy, Márta Rencz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents the manufacturing technology using basic semiconductor technological steps of a novel semitransparent solar cell that can be used for building integrated applications. Arbitrary pattern of holes can be etched using 5 wt.% tetramethylammonium hydroxide solution. Ammonium persulfate powder has to be dissolved in the etchant in order to maintain a stable 1.34 μm/min etching rate over the 3.5 hour etching process. The ARC layer is the 90 nm thick silicon dioxide remaining after the anisotropic etching. The efficiency of the semitransparent solar cell is 6.12% including grid contact and through-hole areas and the reached transparency is 6.7%.

Original languageEnglish
Title of host publicationDTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pages208-213
Number of pages6
Publication statusPublished - Aug 13 2012
Event2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012 - Cannes Cote d'Azur, France
Duration: Apr 25 2012Apr 27 2012

Publication series

NameDTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Other

Other2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012
CountryFrance
CityCannes Cote d'Azur
Period4/25/124/27/12

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ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Bándy, E., & Rencz, M. (2012). New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (pp. 208-213). [6235319] (DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS).