New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell

Eniko Bándy, M. Rencz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper presents the manufacturing technology using basic semiconductor technological steps of a novel semitransparent solar cell that can be used for building integrated applications. Arbitrary pattern of holes can be etched using 5 wt.% tetramethylammonium hydroxide solution. Ammonium persulfate powder has to be dissolved in the etchant in order to maintain a stable 1.34 μm/min etching rate over the 3.5 hour etching process. The ARC layer is the 90 nm thick silicon dioxide remaining after the anisotropic etching. The efficiency of the semitransparent solar cell is 6.12% including grid contact and through-hole areas and the reached transparency is 6.7%.

Original languageEnglish
Title of host publicationDTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pages208-213
Number of pages6
Publication statusPublished - 2012
Event2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012 - Cannes Cote d'Azur, France
Duration: Apr 25 2012Apr 27 2012

Other

Other2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012
CountryFrance
CityCannes Cote d'Azur
Period4/25/124/27/12

Fingerprint

Monocrystalline silicon
Silicon solar cells
Etching
Solar cells
Ammonium persulfate
Anisotropic etching
Transparency
Silica
Semiconductor materials
Powders

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Bándy, E., & Rencz, M. (2012). New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (pp. 208-213). [6235319]

New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell. / Bándy, Eniko; Rencz, M.

DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2012. p. 208-213 6235319.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bándy, E & Rencz, M 2012, New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell. in DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS., 6235319, pp. 208-213, 2012 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2012, Cannes Cote d'Azur, France, 4/25/12.
Bándy E, Rencz M. New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell. In DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2012. p. 208-213. 6235319
Bándy, Eniko ; Rencz, M. / New technology used to manufacture a simple semitransparent monocrystalline silicon solar cell. DTIP 2012 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2012. pp. 208-213
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