Nanopattern formation in UV laser treated a-AlOx and nc-Al/AlOx layers

János Szívós, M. Serényi, E. Gergely-Fülöp, T. Lohner, G. Sáfrán

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Hexagonal nanopatterns were fabricated in sputter deposited Al-oxide thin films by means of single UV laser pulses via a layer of self-assembled silica nanospheres. The hexagonal pattern was projected to the surface due to the focussing effect of the silica nanolenses enhancing the local impact of the pulse. As a result of the laser pulse large area ordered structure of nano-pits were formed in RF (radio frequency) sputtered amorphous Al-oxide films, while nano-craters were created in DC (direct current) sputter deposited layers that consist of Al nanocrystals embedded in amorphous matrix. The two different mechanisms governing the nanostructure formation in the a-AlOx and nc-Al/AlOx composite layers were revealed by Atomic Force Microscopy (AFM), cross-sectional Transmission Electron Microscopy (XTEM), spectroscopic ellipsometry and computer simulation.

Original languageEnglish
Pages (from-to)200-205
Number of pages6
JournalVacuum
Volume109
DOIs
Publication statusPublished - 2014

Fingerprint

ultraviolet lasers
Laser pulses
Silicon Dioxide
Oxide films
Lasers
pulses
Silica
silicon dioxide
Spectroscopic ellipsometry
Nanospheres
Amorphous films
craters
Nanocrystals
ellipsometry
oxide films
Atomic force microscopy
Nanostructures
radio frequencies
nanocrystals
computerized simulation

Keywords

  • Langmuir-Blodgett film
  • Nanopatterning
  • Ordered nanostructures
  • UV laser

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Instrumentation
  • Surfaces, Coatings and Films

Cite this

Nanopattern formation in UV laser treated a-AlOx and nc-Al/AlOx layers. / Szívós, János; Serényi, M.; Gergely-Fülöp, E.; Lohner, T.; Sáfrán, G.

In: Vacuum, Vol. 109, 2014, p. 200-205.

Research output: Contribution to journalArticle

Szívós, János ; Serényi, M. ; Gergely-Fülöp, E. ; Lohner, T. ; Sáfrán, G. / Nanopattern formation in UV laser treated a-AlOx and nc-Al/AlOx layers. In: Vacuum. 2014 ; Vol. 109. pp. 200-205.
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AU - Lohner, T.

AU - Sáfrán, G.

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