Nanoparticle films made by gas phase synthesis: Comparison of various techniques, and sensor applications

P. Heszler, L. F. Reyes, A. Hoel, L. Landström, V. Lantto, C. G. Granqvist

Research output: Contribution to journalConference article

5 Citations (Scopus)


Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects - such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO3) - are presented and compared. WO 3 nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO3 nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly, conductivity changes of a thick WO3 nanoparticle film were detected as it was exposed to test gases (H2S, NO2, and CO).

Original languageEnglish
Pages (from-to)106-119
Number of pages14
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - Nov 26 2003
EventSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
Duration: Mar 3 2003Mar 5 2003



  • Gas deposition
  • Laser ablation
  • LCVD
  • Nanoparticles
  • Sensor
  • Size distribution
  • WO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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