Nanoparticle films made by gas phase synthesis

Comparison of various techniques, and sensor applications

P. Heszler, L. F. Reyes, A. Hoel, L. Landström, V. Lantto, C. G. Granqvist

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Nanoparticles can be generated by several different gas phase methods, such as gas deposition, laser-assisted chemical vapor deposition, and laser ablation. Some of the most important aspects - such as size-distribution, structure, and chemical composition of the generated nanoparticles (specifically W and WO3) - are presented and compared. WO 3 nanoparticle films were deposited by an advanced gas deposition technique and were tested for sensor applications. Two different sensor devices were fabricated: Firstly, a thin Au-WO3 nanoparticle sandwich film was constructed, and conductance fluctuations of the Au film were measured as the sensor was exposed to alcohol vapor. Secondly, conductivity changes of a thick WO3 nanoparticle film were detected as it was exposed to test gases (H2S, NO2, and CO).

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsV.K. Varadan, L.B. Kish
Pages106-119
Number of pages14
Volume5055
DOIs
Publication statusPublished - 2003
EventSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - San Diego, CA, United States
Duration: Mar 3 2003Mar 5 2003

Other

OtherSmart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
CountryUnited States
CitySan Diego, CA
Period3/3/033/5/03

Fingerprint

vapor phases
Nanoparticles
nanoparticles
sensors
Sensors
synthesis
Gases
gases
laser deposition
Laser ablation
laser ablation
Chemical vapor deposition
chemical composition
alcohols
Alcohols
Vapors
vapor deposition
vapors
conductivity
Lasers

Keywords

  • Gas deposition
  • Laser ablation
  • LCVD
  • Nanoparticles
  • Sensor
  • Size distribution
  • WO

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Heszler, P., Reyes, L. F., Hoel, A., Landström, L., Lantto, V., & Granqvist, C. G. (2003). Nanoparticle films made by gas phase synthesis: Comparison of various techniques, and sensor applications. In V. K. Varadan, & L. B. Kish (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5055, pp. 106-119) https://doi.org/10.1117/12.497440

Nanoparticle films made by gas phase synthesis : Comparison of various techniques, and sensor applications. / Heszler, P.; Reyes, L. F.; Hoel, A.; Landström, L.; Lantto, V.; Granqvist, C. G.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / V.K. Varadan; L.B. Kish. Vol. 5055 2003. p. 106-119.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Heszler, P, Reyes, LF, Hoel, A, Landström, L, Lantto, V & Granqvist, CG 2003, Nanoparticle films made by gas phase synthesis: Comparison of various techniques, and sensor applications. in VK Varadan & LB Kish (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5055, pp. 106-119, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, San Diego, CA, United States, 3/3/03. https://doi.org/10.1117/12.497440
Heszler P, Reyes LF, Hoel A, Landström L, Lantto V, Granqvist CG. Nanoparticle films made by gas phase synthesis: Comparison of various techniques, and sensor applications. In Varadan VK, Kish LB, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5055. 2003. p. 106-119 https://doi.org/10.1117/12.497440
Heszler, P. ; Reyes, L. F. ; Hoel, A. ; Landström, L. ; Lantto, V. ; Granqvist, C. G. / Nanoparticle films made by gas phase synthesis : Comparison of various techniques, and sensor applications. Proceedings of SPIE - The International Society for Optical Engineering. editor / V.K. Varadan ; L.B. Kish. Vol. 5055 2003. pp. 106-119
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