Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability

E. Majkova, Y. Chushkin, M. Jergel, S. Luby, V. Holy, I. Matko, B. Chenevier, L. Tóth, T. Hatano, M. Yamamoto

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

Results of comprehensive characterization of Sc/Cr multilayers for soft X-ray mirrors working in the water window range (2.4-4.4 nm) are presented. Multilayer samples were prepared by ion beam sputtering with up to 250 periods in a range of 1.3-1.75 nm. They were analyzed by transmission electron microscopy (TEM), high resolution TEM, X-ray diffractometry, specular X-ray scattering and diffuse X-ray scattering. The TEM inspection showed good periodicity of the multilayer structure. From simulation studies of the specular reflectivity and a reciprocal space map of the diffuse scattering, it follows that the effective roughness of interfaces is 0.25-0.28 nm, being equal to the geometrical roughness data. Lateral and vertical correlation lengths of the roughness are 7 and 35 nm, respectively. Heat treatment study of the Sc/Cr multilayers revealed a reasonable thermal stability. An increase of the multilayer period of 2.4% was observed after 33 h annealing at 280 °C and a considerable decrease of reflectivity followed above 300 °C annealing for 3 h, which corresponds to the low mutual miscibility between Sc and Cr.

Original languageEnglish
Pages (from-to)115-120
Number of pages6
JournalThin Solid Films
Volume497
Issue number1-2
DOIs
Publication statusPublished - Feb 21 2006

Fingerprint

Multilayers
Thermodynamic stability
thermal stability
mirrors
roughness
transmission electron microscopy
Surface roughness
X ray scattering
x rays
scattering
reflectance
annealing
Annealing
Transmission electron microscopy
laminates
periodic variations
inspection
High resolution transmission electron microscopy
heat treatment
solubility

Keywords

  • Grazing incidence X-ray scattering
  • Interface roughness
  • Multilayers
  • Thermal stability

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Majkova, E., Chushkin, Y., Jergel, M., Luby, S., Holy, V., Matko, I., ... Yamamoto, M. (2006). Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability. Thin Solid Films, 497(1-2), 115-120. https://doi.org/10.1016/j.tsf.2005.10.051

Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability. / Majkova, E.; Chushkin, Y.; Jergel, M.; Luby, S.; Holy, V.; Matko, I.; Chenevier, B.; Tóth, L.; Hatano, T.; Yamamoto, M.

In: Thin Solid Films, Vol. 497, No. 1-2, 21.02.2006, p. 115-120.

Research output: Contribution to journalArticle

Majkova, E, Chushkin, Y, Jergel, M, Luby, S, Holy, V, Matko, I, Chenevier, B, Tóth, L, Hatano, T & Yamamoto, M 2006, 'Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability', Thin Solid Films, vol. 497, no. 1-2, pp. 115-120. https://doi.org/10.1016/j.tsf.2005.10.051
Majkova E, Chushkin Y, Jergel M, Luby S, Holy V, Matko I et al. Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability. Thin Solid Films. 2006 Feb 21;497(1-2):115-120. https://doi.org/10.1016/j.tsf.2005.10.051
Majkova, E. ; Chushkin, Y. ; Jergel, M. ; Luby, S. ; Holy, V. ; Matko, I. ; Chenevier, B. ; Tóth, L. ; Hatano, T. ; Yamamoto, M. / Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability. In: Thin Solid Films. 2006 ; Vol. 497, No. 1-2. pp. 115-120.
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AB - Results of comprehensive characterization of Sc/Cr multilayers for soft X-ray mirrors working in the water window range (2.4-4.4 nm) are presented. Multilayer samples were prepared by ion beam sputtering with up to 250 periods in a range of 1.3-1.75 nm. They were analyzed by transmission electron microscopy (TEM), high resolution TEM, X-ray diffractometry, specular X-ray scattering and diffuse X-ray scattering. The TEM inspection showed good periodicity of the multilayer structure. From simulation studies of the specular reflectivity and a reciprocal space map of the diffuse scattering, it follows that the effective roughness of interfaces is 0.25-0.28 nm, being equal to the geometrical roughness data. Lateral and vertical correlation lengths of the roughness are 7 and 35 nm, respectively. Heat treatment study of the Sc/Cr multilayers revealed a reasonable thermal stability. An increase of the multilayer period of 2.4% was observed after 33 h annealing at 280 °C and a considerable decrease of reflectivity followed above 300 °C annealing for 3 h, which corresponds to the low mutual miscibility between Sc and Cr.

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