Nanocrystal non-volatile memory devices

Zs J. Horváth, Basa Horváth

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

The physical background and present status of the application of metal-insulator-silicon structures with semiconductor nanocrystals embedded in the insulator layer for memory purposes is breafly summarized.

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalMaterials Science Forum
Volume609
DOIs
Publication statusPublished - 2009

Fingerprint

Silicon
Nanocrystals
nanocrystals
Metals
insulators
Semiconductor materials
Data storage equipment
silicon
metals

Keywords

  • CVD
  • Ion implantation
  • MIS
  • MNOS
  • Nanocrystal
  • Non-volatile memory
  • Silicon nitiride

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Nanocrystal non-volatile memory devices. / Horváth, Zs J.; Horváth, Basa.

In: Materials Science Forum, Vol. 609, 2009, p. 1-9.

Research output: Contribution to journalArticle

Horváth, Zs J. ; Horváth, Basa. / Nanocrystal non-volatile memory devices. In: Materials Science Forum. 2009 ; Vol. 609. pp. 1-9.
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