Multipurpose 14.5 GHz ECR ion source: Special features and application for surface modification

Research output: Contribution to journalConference article

8 Citations (Scopus)

Abstract

Highly charged Xe+q ions (up to q = 27) were produced by a 14.5 GHz electron cyclotron resonance ion source and used for solid surface modification experiments. AFM investigations show that hillock-like defects are created by ions with q = 20 and 24 on the surface of thin Se films as well as on the natural facets of multi-component SbSI crystals.

Original languageEnglish
Pages (from-to)222-226
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume233
Issue number1-4
DOIs
Publication statusPublished - May 1 2005
EventFast Ion-Atom Collisions Proceedings of the Eight Workshop on Fast Ion-Atom Collisions -
Duration: Sep 1 2004Sep 3 2004

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Keywords

  • ECR
  • ECRIS
  • HCI
  • Hillocks
  • Nanopatterns
  • Surface modification

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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