Multiple scattering analysis for determining the electron inelastic mean free path (IMFP) by elastic peak electron spectroscopy

B. Lesiak, A. Jablonski, G. Gergely

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

The IMFP of electrons in high atomic number solids was determined using elastic peak electron spectroscopy. The Monte Carlo calculations based on the differential elastic scattering cross-sections resulting from the partial wave expansion method made possible the accurate analysis of experimental results. Multiple elastic scattering of electrons is playing a dominant role in high atomic number elements. Experiments provided the ratio of elastic peak intensities for a given sample and the standard. The CMA was used in the measurements. In this work the IMFP of Ta, W and Au was studied, using Al as a standard. Multiple elastic backscattering probability. The ration of angular distribution of elastically backscattered electrons and the elastic backscattering probability. The ratio of elastic peak intensity of the sample and of the standard was calculated for the CMA detecting angle (θ = 138°) and fitted to the experimental results. Such procedure provides the true value of the IMFP. Results were obtained in the energy range between 500 and 3000 eV. They are compared to the available literature data.

Original languageEnglish
Pages (from-to)67-69
Number of pages3
JournalVacuum
Volume40
Issue number1-2
DOIs
Publication statusPublished - 1990

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Electron spectroscopy
Multiple scattering
mean free path
electron spectroscopy
Elastic scattering
Backscattering
Electrons
backscattering
elastic scattering
scattering
rations
electrons
Angular distribution
elastic waves
scattering cross sections
angular distribution
Experiments
energy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Multiple scattering analysis for determining the electron inelastic mean free path (IMFP) by elastic peak electron spectroscopy. / Lesiak, B.; Jablonski, A.; Gergely, G.

In: Vacuum, Vol. 40, No. 1-2, 1990, p. 67-69.

Research output: Contribution to journalArticle

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