Multiphysics modelling of the fabrication and operation of a micro-pellistor device

Ferenc Biró, Zoltan Hajnal, Andrea Edit Pap, Istvan Barsony

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Downsizing efforts in gas-sensing applications lead to ever smaller active elements. Integration with data processing circuitry requires the use of CMOS compatible fabrication technology, autonomous operation poses limits on energy consumption of the elements, whereas reliable catalytic detection often needs high temperatures that may otherwise be constrained by safety considerations. Under these conditions, development of active sensor elements proves to be a growing challenge for design and fabrication.

Original languageEnglish
Title of host publication2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014
PublisherIEEE Computer Society
ISBN (Print)9781479947904
DOIs
Publication statusPublished - Jan 1 2014
Event2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014 - Ghent, Belgium
Duration: Apr 7 2014Apr 9 2014

Publication series

Name2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014

Other

Other2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014
CountryBelgium
CityGhent
Period4/7/144/9/14

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Modelling and Simulation

Cite this

Biró, F., Hajnal, Z., Pap, A. E., & Barsony, I. (2014). Multiphysics modelling of the fabrication and operation of a micro-pellistor device. In 2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014 [6813867] (2014 15th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014). IEEE Computer Society. https://doi.org/10.1109/EuroSimE.2014.6813867