Multilayer TiAlN coatings with composition gradient

R. Manaila, A. Devenyi, D. Biro, L. David, P. Barna, A. Kovacs

Research output: Contribution to journalArticle

38 Citations (Scopus)

Abstract

The fuzzy-logic process control system has been adapted to the unbalanced magnetron reactive sputter deposition of Ti1-xAIxN coatings. This made possible the dynamic control of the deposition rate, chemical composition and structure of the coatings and provided stable working conditions inside the hysteresis loop of the reactive sputtering also. By applying this control system, multilayers of micro- and nanocrystalline composite structures were prepared with compositions of Ti39AI61N and Ti56AI44N of TiN-AIN cubic solid solution phases.

Original languageEnglish
Pages (from-to)21-25
Number of pages5
JournalSurface and Coatings Technology
Volume151-152
DOIs
Publication statusPublished - Mar 1 2002

Fingerprint

Multilayers
Control systems
coatings
dynamic control
Coatings
gradients
Sputter deposition
Reactive sputtering
composite structures
Hysteresis loops
Composite structures
Deposition rates
Chemical analysis
Fuzzy logic
Process control
logic
Solid solutions
chemical composition
solid solutions
sputtering

Keywords

  • Fuzzy-control
  • Graded-composition
  • Multilayer
  • Nanocrystals
  • Reactive sputtering
  • Ti-Al-N coating

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Multilayer TiAlN coatings with composition gradient. / Manaila, R.; Devenyi, A.; Biro, D.; David, L.; Barna, P.; Kovacs, A.

In: Surface and Coatings Technology, Vol. 151-152, 01.03.2002, p. 21-25.

Research output: Contribution to journalArticle

Manaila, R. ; Devenyi, A. ; Biro, D. ; David, L. ; Barna, P. ; Kovacs, A. / Multilayer TiAlN coatings with composition gradient. In: Surface and Coatings Technology. 2002 ; Vol. 151-152. pp. 21-25.
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