Morphological investigation of porous samples by resonant backscattering spectrometry

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When performing backscattering spectroscopy measurements slightly above the energy where a sharp resonance exists in the elastic scattering cross section a characteristic resonance peak appears in the energy spectra of the backscattered particles. Unlike homogeneous samples where the position and width of this peak are mainly determined by the experimental set-up (incident energy, resonance width, etc.) for porous materials the peak width depends on the structure of the sample. This effect is caused by fluctuations in the stopping power along the trajectories of incident and scattered ions. Using the 3045 keV resonance in the 16O(α,α)16O reaction for analysing oxidised porous silicon samples, it was demonstrated both experimentally and theoretically that: (i) the widening of the resonance peak is easily observable, (ii) it is closely related to the actual morphology of the samples and (iii) it can be applied to determine morphological details, as porosity, average pore diameter and anisotropy of the pore directions.

Original languageEnglish
Pages (from-to)533-539
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - Mar 1998


  • Backscattering spectrometry
  • Porous silicon
  • Resonance
  • Structure

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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