Morphological investigation of porous samples by resonant backscattering spectrometry

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Abstract

When performing backscattering spectroscopy measurements slightly above the energy where a sharp resonance exists in the elastic scattering cross section a characteristic resonance peak appears in the energy spectra of the backscattered particles. Unlike homogeneous samples where the position and width of this peak are mainly determined by the experimental set-up (incident energy, resonance width, etc.) for porous materials the peak width depends on the structure of the sample. This effect is caused by fluctuations in the stopping power along the trajectories of incident and scattered ions. Using the 3045 keV resonance in the 16O(α,α)16O reaction for analysing oxidised porous silicon samples, it was demonstrated both experimentally and theoretically that: (i) the widening of the resonance peak is easily observable, (ii) it is closely related to the actual morphology of the samples and (iii) it can be applied to determine morphological details, as porosity, average pore diameter and anisotropy of the pore directions.

Original languageEnglish
Pages (from-to)533-539
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume136-138
Publication statusPublished - Mar 1998

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Backscattering
Spectrometry
backscattering
spectroscopy
porosity
Elastic scattering
Porous silicon
stopping power
porous materials
porous silicon
scattering cross sections
Porous materials
elastic scattering
Anisotropy
energy spectra
Porosity
Trajectories
trajectories
Spectroscopy
Ions

Keywords

  • Backscattering spectrometry
  • Porous silicon
  • Resonance
  • Structure

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

@article{41f37097eb584bf591f7e4be175ff4a8,
title = "Morphological investigation of porous samples by resonant backscattering spectrometry",
abstract = "When performing backscattering spectroscopy measurements slightly above the energy where a sharp resonance exists in the elastic scattering cross section a characteristic resonance peak appears in the energy spectra of the backscattered particles. Unlike homogeneous samples where the position and width of this peak are mainly determined by the experimental set-up (incident energy, resonance width, etc.) for porous materials the peak width depends on the structure of the sample. This effect is caused by fluctuations in the stopping power along the trajectories of incident and scattered ions. Using the 3045 keV resonance in the 16O(α,α)16O reaction for analysing oxidised porous silicon samples, it was demonstrated both experimentally and theoretically that: (i) the widening of the resonance peak is easily observable, (ii) it is closely related to the actual morphology of the samples and (iii) it can be applied to determine morphological details, as porosity, average pore diameter and anisotropy of the pore directions.",
keywords = "Backscattering spectrometry, Porous silicon, Resonance, Structure",
author = "F. P{\'a}szti and E. Szil{\'a}gyi and Z. Horv{\'a}th and A. Manuaba and G. Battistig and Z. Hajnal and E. V{\'a}zsonyi",
year = "1998",
month = "3",
language = "English",
volume = "136-138",
pages = "533--539",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

TY - JOUR

T1 - Morphological investigation of porous samples by resonant backscattering spectrometry

AU - Pászti, F.

AU - Szilágyi, E.

AU - Horváth, Z.

AU - Manuaba, A.

AU - Battistig, G.

AU - Hajnal, Z.

AU - Vázsonyi, E.

PY - 1998/3

Y1 - 1998/3

N2 - When performing backscattering spectroscopy measurements slightly above the energy where a sharp resonance exists in the elastic scattering cross section a characteristic resonance peak appears in the energy spectra of the backscattered particles. Unlike homogeneous samples where the position and width of this peak are mainly determined by the experimental set-up (incident energy, resonance width, etc.) for porous materials the peak width depends on the structure of the sample. This effect is caused by fluctuations in the stopping power along the trajectories of incident and scattered ions. Using the 3045 keV resonance in the 16O(α,α)16O reaction for analysing oxidised porous silicon samples, it was demonstrated both experimentally and theoretically that: (i) the widening of the resonance peak is easily observable, (ii) it is closely related to the actual morphology of the samples and (iii) it can be applied to determine morphological details, as porosity, average pore diameter and anisotropy of the pore directions.

AB - When performing backscattering spectroscopy measurements slightly above the energy where a sharp resonance exists in the elastic scattering cross section a characteristic resonance peak appears in the energy spectra of the backscattered particles. Unlike homogeneous samples where the position and width of this peak are mainly determined by the experimental set-up (incident energy, resonance width, etc.) for porous materials the peak width depends on the structure of the sample. This effect is caused by fluctuations in the stopping power along the trajectories of incident and scattered ions. Using the 3045 keV resonance in the 16O(α,α)16O reaction for analysing oxidised porous silicon samples, it was demonstrated both experimentally and theoretically that: (i) the widening of the resonance peak is easily observable, (ii) it is closely related to the actual morphology of the samples and (iii) it can be applied to determine morphological details, as porosity, average pore diameter and anisotropy of the pore directions.

KW - Backscattering spectrometry

KW - Porous silicon

KW - Resonance

KW - Structure

UR - http://www.scopus.com/inward/record.url?scp=0042094872&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042094872&partnerID=8YFLogxK

M3 - Article

VL - 136-138

SP - 533

EP - 539

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -