A Monte Carlo simulation has been developed to describe the incoherent and coherent scatter processes for the complex geometry of a secondary target energy‐dispersive x‐ray fluorescence system. Photons are followed from the x‐ray tube anode until the detection of scattered secondary target photons in the active Si layer of the detector. The program quantitatively shows the broadening of the incoherent scatter peak with increasing atomic number, and it models the incoherent peak shape adequately. The incoherent‐to‐coherent scatter intensity ratios obtained differ by 10–30% from the theoretical values, while their dependence on the sample atomic number corresponds to that expected from theory.
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