Monte Carlo modelling of the backscattered electron spectra of silver at the 200 eV and 2 keV primary electron energies

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Abstract

The electron energy distribution of the backscattered electrons from a polycrystalline silver sample was studied in the direction of the surface normal of the specimen, at the 200 eV and 2 keV energy of the primary beam. The angle of the incident electron beam was 50° with respect to the surface norm. For simulation of the backscattered electron energy distributions the Monte Carlo technique was used and the computed spectra were compared to the measured reflected electron spectra in the energy range of few times 10 eV from the elastic peak. The probable reasons of the observed discrepancies between the measured reflected electron energy loss spectra and the calculated spectra are discussed. In addition, the yield of the backscattered electrons as a function of the number of elastic and inelastic collisions is compared for different parts of the backscattered electron spectra.

Original languageEnglish
Pages (from-to)427-432
Number of pages6
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume76
Issue numberC
DOIs
Publication statusPublished - Dec 29 1995

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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