### Abstract

The backscattering yield (BY) is an important factor in elastic peak electron spectroscopy. Monte Carlo (MC) algorithm describing the electron elastic and inelastic backscattering from surfaces is presented applying the continuous slowing down approximation, i.e., an assumption that an electron loses energy continuously along the trajectory length. Energy losses calculations were performed using recently published stopping power (SP) functions, calculated from the experimental optical data by Tanuma et al., and the experimental SP functions published elsewhere. In the MC algorithm, calculating the values of BY, the input parameters are the elastic scattering cross sections and the SP function. The MC calculations were performed at selected energies ranging from 200 to 30 000 eV. Ten elemental solids were considered: Al, Si, Cr, Ni, Cu, Ge, Pd, Ag, Pt, and Au. All MC simulations were performed for normal incidence of the beam on a sample and the backscattered electron emission into negative hemisphere. Results of BY calculations were compared to available experimental data taken from Joy database of electron-solid interactions. In most cases, the results deviate less than 10% from the available experimental data.

Original language | English |
---|---|

Pages (from-to) | 201-204 |

Number of pages | 4 |

Journal | Vacuum |

Volume | 82 |

Issue number | 2 SPEC. ISS. |

DOIs | |

Publication status | Published - Oct 29 2007 |

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### Keywords

- Backscattering yield
- Computer simulation
- Elastic and inelastic scattering
- Electron-solid interactions
- Monte Carlo algorithm

### ASJC Scopus subject areas

- Surfaces, Coatings and Films
- Condensed Matter Physics
- Surfaces and Interfaces

### Cite this

*Vacuum*,

*82*(2 SPEC. ISS.), 201-204. https://doi.org/10.1016/j.vacuum.2007.07.040

**Monte Carlo backscattering yield (BY) calculations applying continuous slowing down approximation (CSDA) and experimental data.** / Zommer, L.; Jablonski, A.; Gergely, G.; Gurban, S.

Research output: Contribution to journal › Article

*Vacuum*, vol. 82, no. 2 SPEC. ISS., pp. 201-204. https://doi.org/10.1016/j.vacuum.2007.07.040

}

TY - JOUR

T1 - Monte Carlo backscattering yield (BY) calculations applying continuous slowing down approximation (CSDA) and experimental data

AU - Zommer, L.

AU - Jablonski, A.

AU - Gergely, G.

AU - Gurban, S.

PY - 2007/10/29

Y1 - 2007/10/29

N2 - The backscattering yield (BY) is an important factor in elastic peak electron spectroscopy. Monte Carlo (MC) algorithm describing the electron elastic and inelastic backscattering from surfaces is presented applying the continuous slowing down approximation, i.e., an assumption that an electron loses energy continuously along the trajectory length. Energy losses calculations were performed using recently published stopping power (SP) functions, calculated from the experimental optical data by Tanuma et al., and the experimental SP functions published elsewhere. In the MC algorithm, calculating the values of BY, the input parameters are the elastic scattering cross sections and the SP function. The MC calculations were performed at selected energies ranging from 200 to 30 000 eV. Ten elemental solids were considered: Al, Si, Cr, Ni, Cu, Ge, Pd, Ag, Pt, and Au. All MC simulations were performed for normal incidence of the beam on a sample and the backscattered electron emission into negative hemisphere. Results of BY calculations were compared to available experimental data taken from Joy database of electron-solid interactions. In most cases, the results deviate less than 10% from the available experimental data.

AB - The backscattering yield (BY) is an important factor in elastic peak electron spectroscopy. Monte Carlo (MC) algorithm describing the electron elastic and inelastic backscattering from surfaces is presented applying the continuous slowing down approximation, i.e., an assumption that an electron loses energy continuously along the trajectory length. Energy losses calculations were performed using recently published stopping power (SP) functions, calculated from the experimental optical data by Tanuma et al., and the experimental SP functions published elsewhere. In the MC algorithm, calculating the values of BY, the input parameters are the elastic scattering cross sections and the SP function. The MC calculations were performed at selected energies ranging from 200 to 30 000 eV. Ten elemental solids were considered: Al, Si, Cr, Ni, Cu, Ge, Pd, Ag, Pt, and Au. All MC simulations were performed for normal incidence of the beam on a sample and the backscattered electron emission into negative hemisphere. Results of BY calculations were compared to available experimental data taken from Joy database of electron-solid interactions. In most cases, the results deviate less than 10% from the available experimental data.

KW - Backscattering yield

KW - Computer simulation

KW - Elastic and inelastic scattering

KW - Electron-solid interactions

KW - Monte Carlo algorithm

UR - http://www.scopus.com/inward/record.url?scp=35248813806&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35248813806&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2007.07.040

DO - 10.1016/j.vacuum.2007.07.040

M3 - Article

VL - 82

SP - 201

EP - 204

JO - Vacuum

JF - Vacuum

SN - 0042-207X

IS - 2 SPEC. ISS.

ER -