Molten targets in pulsed laser deposition

T. Szörényi, Zoltán Kántor, Z. Tóth

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An inherent problem of Pulsed Laser Deposition (PLD) is the undesired particulate formation which is assigned to the deterioration of the solid target surface upon repetitive ablation and instabilities due to fast phase transitions. It could be expected (and has also been claimed by several authors) that ablating liquid targets, i.e. self-reproducing smooth surfaces allows for particulate-free fill deposition. In spite of a couple of impressive experiments, it was not yet clarified whether particulate formation was avoided by the use of the liquid target, or only particulate deposition was avoided by choosing appropriate experimental circumstances. In this paper we aimed at answering this question. For this purpose we deposited indium fills by ablating solid and liquid indium targets in vacuum (i.e. we deposited the same metal as we ablated). The substrates were held at room-temperature in order to collect and preserve the droplets formed. Using molten targets, the particulate number density decreased by orders of magnitude as compared to the solid-target case. However, particulate formation could not be totally eliminated, which led us to the conclusion that this technique does not offer an ultimate solution, either.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsV.I. Pustovoy
Pages2-7
Number of pages6
Volume3404
DOIs
Publication statusPublished - 1997
EventALT 1997 International Conference on Laser Surface Processing - Limoges, France
Duration: Sep 8 1997Sep 12 1997

Other

OtherALT 1997 International Conference on Laser Surface Processing
CountryFrance
CityLimoges
Period9/8/979/12/97

Fingerprint

Pulsed laser deposition
particulates
pulsed laser deposition
Molten materials
Indium
Liquids
Ablation
indium
Deterioration
liquids
Phase transitions
Vacuum
Substrates
Metals
deterioration
ablation
Experiments
Temperature
vacuum
room temperature

Keywords

  • Particulates
  • PLD
  • Pulsed laser deposition
  • Thin films

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Szörényi, T., Kántor, Z., & Tóth, Z. (1997). Molten targets in pulsed laser deposition. In V. I. Pustovoy (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3404, pp. 2-7) https://doi.org/10.1117/12.308595

Molten targets in pulsed laser deposition. / Szörényi, T.; Kántor, Zoltán; Tóth, Z.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / V.I. Pustovoy. Vol. 3404 1997. p. 2-7.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Szörényi, T, Kántor, Z & Tóth, Z 1997, Molten targets in pulsed laser deposition. in VI Pustovoy (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 3404, pp. 2-7, ALT 1997 International Conference on Laser Surface Processing, Limoges, France, 9/8/97. https://doi.org/10.1117/12.308595
Szörényi T, Kántor Z, Tóth Z. Molten targets in pulsed laser deposition. In Pustovoy VI, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3404. 1997. p. 2-7 https://doi.org/10.1117/12.308595
Szörényi, T. ; Kántor, Zoltán ; Tóth, Z. / Molten targets in pulsed laser deposition. Proceedings of SPIE - The International Society for Optical Engineering. editor / V.I. Pustovoy. Vol. 3404 1997. pp. 2-7
@inproceedings{77aae677cdc34acd80650b0513a35877,
title = "Molten targets in pulsed laser deposition",
abstract = "An inherent problem of Pulsed Laser Deposition (PLD) is the undesired particulate formation which is assigned to the deterioration of the solid target surface upon repetitive ablation and instabilities due to fast phase transitions. It could be expected (and has also been claimed by several authors) that ablating liquid targets, i.e. self-reproducing smooth surfaces allows for particulate-free fill deposition. In spite of a couple of impressive experiments, it was not yet clarified whether particulate formation was avoided by the use of the liquid target, or only particulate deposition was avoided by choosing appropriate experimental circumstances. In this paper we aimed at answering this question. For this purpose we deposited indium fills by ablating solid and liquid indium targets in vacuum (i.e. we deposited the same metal as we ablated). The substrates were held at room-temperature in order to collect and preserve the droplets formed. Using molten targets, the particulate number density decreased by orders of magnitude as compared to the solid-target case. However, particulate formation could not be totally eliminated, which led us to the conclusion that this technique does not offer an ultimate solution, either.",
keywords = "Particulates, PLD, Pulsed laser deposition, Thin films",
author = "T. Sz{\"o}r{\'e}nyi and Zolt{\'a}n K{\'a}ntor and Z. T{\'o}th",
year = "1997",
doi = "10.1117/12.308595",
language = "English",
volume = "3404",
pages = "2--7",
editor = "V.I. Pustovoy",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Molten targets in pulsed laser deposition

AU - Szörényi, T.

AU - Kántor, Zoltán

AU - Tóth, Z.

PY - 1997

Y1 - 1997

N2 - An inherent problem of Pulsed Laser Deposition (PLD) is the undesired particulate formation which is assigned to the deterioration of the solid target surface upon repetitive ablation and instabilities due to fast phase transitions. It could be expected (and has also been claimed by several authors) that ablating liquid targets, i.e. self-reproducing smooth surfaces allows for particulate-free fill deposition. In spite of a couple of impressive experiments, it was not yet clarified whether particulate formation was avoided by the use of the liquid target, or only particulate deposition was avoided by choosing appropriate experimental circumstances. In this paper we aimed at answering this question. For this purpose we deposited indium fills by ablating solid and liquid indium targets in vacuum (i.e. we deposited the same metal as we ablated). The substrates were held at room-temperature in order to collect and preserve the droplets formed. Using molten targets, the particulate number density decreased by orders of magnitude as compared to the solid-target case. However, particulate formation could not be totally eliminated, which led us to the conclusion that this technique does not offer an ultimate solution, either.

AB - An inherent problem of Pulsed Laser Deposition (PLD) is the undesired particulate formation which is assigned to the deterioration of the solid target surface upon repetitive ablation and instabilities due to fast phase transitions. It could be expected (and has also been claimed by several authors) that ablating liquid targets, i.e. self-reproducing smooth surfaces allows for particulate-free fill deposition. In spite of a couple of impressive experiments, it was not yet clarified whether particulate formation was avoided by the use of the liquid target, or only particulate deposition was avoided by choosing appropriate experimental circumstances. In this paper we aimed at answering this question. For this purpose we deposited indium fills by ablating solid and liquid indium targets in vacuum (i.e. we deposited the same metal as we ablated). The substrates were held at room-temperature in order to collect and preserve the droplets formed. Using molten targets, the particulate number density decreased by orders of magnitude as compared to the solid-target case. However, particulate formation could not be totally eliminated, which led us to the conclusion that this technique does not offer an ultimate solution, either.

KW - Particulates

KW - PLD

KW - Pulsed laser deposition

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=0031393562&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031393562&partnerID=8YFLogxK

U2 - 10.1117/12.308595

DO - 10.1117/12.308595

M3 - Conference contribution

VL - 3404

SP - 2

EP - 7

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Pustovoy, V.I.

ER -