Modular, PC controlled photometric ellipsometer with variable angle of incidence and spectral options

T. Mosoni, P. Petrik, M. Fried, I. Bársony

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

We have built a modular, PC controlled ellipsometer with variable angle of incidence measuring possibility. We used a HeNe laser, PIN-diode detector and film polarizer in the analyzer and polarizer elements at first. The analyzer, polarizer and goniometer unit of the ellipsometer are moved by a computer controlled mechanism. The data processing program developed by us makes it possible to evaluate measurements with several angles of incidence, too, which are used to measure samples with complex layer structure. The units of the equipment are easily replaceable in consequence of modularity. It has been developed further to a spectroscopic ellipsometer in the spectral range of 400 to 641 nm by using a xenon lamp and a CCD array detector with optical grating as a diffraction element in spite of a laser and a PIN-diode detector. The analyzer was rotated by a step-motor (quasi-stationary method) or a DC-motor (dynamic method) . These two methods allow the choice of a faster but less accurate (dynamic method) or a slower but very precise (quasi-stationary) measurement. Further development of the quasi-stationary arrangement will provide a speed comparable with the dynamic method together with a high accuracy.

Original languageEnglish
Pages (from-to)355-358
Number of pages4
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3573
DOIs
Publication statusPublished - Aug 19 1998
Event5th Congress on Modern Optics, OPTIKA 1998 - Budapest, Hungary
Duration: Sep 14 1998Sep 17 1998

Keywords

  • Dynamical ellipsometer
  • Ellipsometry
  • Quasi-st ationary ellipsometer
  • Spectroscopic measurement
  • Variable angle of incidence

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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