Modification of optical properties of copper surfaces by ion bombardment

M. V. Vinnichenko, T. Lohner, L. V. Poperenko, I. V. Yurgelevych, D. V. Nosach

Research output: Contribution to journalArticle

Abstract

Influence of ion bombardment by N2+, N2+ and D+ ions on optical properties of copper films evaporated on single crystal silicon wafer and samples of balk Cu was studied by angular and spectral ellipsometry. Microrelief of surface of the copper samples was studied by optical microscopy. It was found that principal incidence angle and optical conductivity of Cu subsurface layer decrease after nitrogen ion bombardment. The values of optical conductivity of nonirradiated Cu film after staying in air atmosphere during a long time decrease not less than twice in ultraviolet spectral range due to formation of oxide film Additional irradiation by N2+ ions does not improve corrosion stability of Cu films. It was obtained that interaction of D+ ions with subsurface layer of Cu increases the roughness of surface and essentially changes the spectra of optical conductivity.

Original languageEnglish
Pages (from-to)87-92
Number of pages6
JournalPoverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya
Issue number10
Publication statusPublished - 2005

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Optical conductivity
Ion bombardment
Optical properties
Copper
Ions
Ellipsometry
Silicon wafers
Oxide films
Optical microscopy
Surface roughness
Irradiation
Single crystals
Corrosion
Nitrogen
Air

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Vinnichenko, M. V., Lohner, T., Poperenko, L. V., Yurgelevych, I. V., & Nosach, D. V. (2005). Modification of optical properties of copper surfaces by ion bombardment. Poverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya, (10), 87-92.

Modification of optical properties of copper surfaces by ion bombardment. / Vinnichenko, M. V.; Lohner, T.; Poperenko, L. V.; Yurgelevych, I. V.; Nosach, D. V.

In: Poverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya, No. 10, 2005, p. 87-92.

Research output: Contribution to journalArticle

Vinnichenko, M. V. ; Lohner, T. ; Poperenko, L. V. ; Yurgelevych, I. V. ; Nosach, D. V. / Modification of optical properties of copper surfaces by ion bombardment. In: Poverkhnost Rentgenovskie Sinkhronnye i Nejtronnye Issledovaniya. 2005 ; No. 10. pp. 87-92.
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