MNOS and MNS memory structures with embedded SI nanocrystals

Zs J. Horváth, P. Basa, T. Jászi, K. Nagy, A. E. Pap, T. SzabÓ, P. Szollosi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Non-volatile MNOS and MNS memory structures with an embedded sheet of Si nanocrystals have been prepared by low pressure chemical vapour deposition using a Si3N4 control layer and SiO2 or Si 3N4 tunnel layers. Si nanocrystals improved the charging behaviour of the MNOS structures. Memory window width of 1.3 V and 2.0 V was achieved for charging pulses of ±9 V and ±10 V, 100 ms, respectively.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes
Pages566-569
Number of pages4
Publication statusPublished - 2007
EventInternational Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Minsk, Belarus
Duration: May 22 2007May 25 2007

Other

OtherInternational Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007
CountryBelarus
CityMinsk
Period5/22/075/25/07

Fingerprint

Nanoparticles
Vapor Pressure
silicon nitride

ASJC Scopus subject areas

  • Biotechnology

Cite this

Horváth, Z. J., Basa, P., Jászi, T., Nagy, K., Pap, A. E., SzabÓ, T., & Szollosi, P. (2007). MNOS and MNS memory structures with embedded SI nanocrystals. In Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes (pp. 566-569)

MNOS and MNS memory structures with embedded SI nanocrystals. / Horváth, Zs J.; Basa, P.; Jászi, T.; Nagy, K.; Pap, A. E.; SzabÓ, T.; Szollosi, P.

Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes. 2007. p. 566-569.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Horváth, ZJ, Basa, P, Jászi, T, Nagy, K, Pap, AE, SzabÓ, T & Szollosi, P 2007, MNOS and MNS memory structures with embedded SI nanocrystals. in Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes. pp. 566-569, International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007, Minsk, Belarus, 5/22/07.
Horváth ZJ, Basa P, Jászi T, Nagy K, Pap AE, SzabÓ T et al. MNOS and MNS memory structures with embedded SI nanocrystals. In Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes. 2007. p. 566-569
Horváth, Zs J. ; Basa, P. ; Jászi, T. ; Nagy, K. ; Pap, A. E. ; SzabÓ, T. ; Szollosi, P. / MNOS and MNS memory structures with embedded SI nanocrystals. Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes. 2007. pp. 566-569
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