MNOS and MNS memory structures with embedded SI nanocrystals

Zs J. Horváth, P. Basa, T. Jászi, K. Nagy, A. E. Pap, T. SzabÓ, P. Szollosi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Non-volatile MNOS and MNS memory structures with an embedded sheet of Si nanocrystals have been prepared by low pressure chemical vapour deposition using a Si3N4 control layer and SiO2 or Si 3N4 tunnel layers. Si nanocrystals improved the charging behaviour of the MNOS structures. Memory window width of 1.3 V and 2.0 V was achieved for charging pulses of ±9 V and ±10 V, 100 ms, respectively.

Original languageEnglish
Title of host publicationProceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes
Pages566-569
Number of pages4
Publication statusPublished - Dec 1 2007
EventInternational Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Minsk, Belarus
Duration: May 22 2007May 25 2007

Publication series

NameProceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes

Other

OtherInternational Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007
CountryBelarus
CityMinsk
Period5/22/075/25/07

ASJC Scopus subject areas

  • Biotechnology

Fingerprint Dive into the research topics of 'MNOS and MNS memory structures with embedded SI nanocrystals'. Together they form a unique fingerprint.

  • Cite this

    Horváth, Z. J., Basa, P., Jászi, T., Nagy, K., Pap, A. E., SzabÓ, T., & Szollosi, P. (2007). MNOS and MNS memory structures with embedded SI nanocrystals. In Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes (pp. 566-569). (Proceedings of the International Conference on Physics, Chemistry and Application of Nanostructures, NANOMEETING 2007 - Reviews and Short Notes).